Ti-DLC films with superior friction performance

Diamond and Related Materials

Volumn 19, Issue 4, 2010, Pages 342-349

  Zhao, Fei ^a,b   Li, Hongxuan ^a   Ji, Li ^a   Wang, Yongjun ^a,b   Zhou, Huidi ^a   Chen, Jianmin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Load; Relative humidity; RF PECVD; Ti doped DLC; Ultralow friction

Indexed keywords

AMBIENT AIR; AR PLASMAS; COMBINED EFFECT; COSPUTTERING; DLC FILM; FRICTION COEFFICIENTS; FRICTION PERFORMANCE; HYDROGENATED DLC FILMS; LUBRICATION PERFORMANCE; RADIO FREQUENCIES; RELATIVE HUMIDITIES; RF-PECVD; STRUCTURAL TRANSFORMATION; TI-DOPED DLC; TITANIUM TARGETS; TRANSFER FILM; ULTRA-LOW FRICTION;

ATMOSPHERIC HUMIDITY; CHEMICAL VAPOR DEPOSITION; MOISTURE; TITANIUM; TRIBOLOGY;

FRICTION;

EID: 76749157366     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2010.01.008     Document Type: Article

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