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Vacuum

Volumn 85, Issue 8, 2011, Pages 792-797

Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique

(3) Dai, Wei a Ke, Peiling a Wang, Aiying a

a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING (China)

Author keywords

Diamond like carbon; Mechanical property; Microstructure; Surface morphology

Indexed keywords

AFM; CARBIDE PHASIS; CR CONTENT; DC MAGNETRON SPUTTERING; DIAMOND-LIKE CARBON; DLC FILM; FILM SURFACE MORPHOLOGY; FLAT SURFACES; FRICTION COEFFICIENTS; HIGH HARDNESS; HYBRID BEAM; LOW FRICTION COEFFICIENTS; MATRIX; MICROSTRUCTURE AND PROPERTIES; ROUGH SURFACES; SEM; TEM; TRIBOLOGICAL BEHAVIORS; WEAR RATES; XPS;

AMORPHOUS FILMS; CARBIDES; CARBON FILMS; CHROMIUM; COMPOSITE FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; FRICTION; ION SOURCES; MECHANICAL PROPERTIES; METALLIC MATRIX COMPOSITES; MICROSTRUCTURE; MORPHOLOGY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TRIBOLOGY;

SURFACE MORPHOLOGY;

EID: 79951677207 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2010.11.013 Document Type: Article

Times cited : (94)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.