SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 489, Issue 1-2, 2005, Pages 150-158

Cr-diamondlike carbon nanocomposite films: Synthesis, characterization and properties

(3) Singh, V a,b Jiang, J C a Meletis, E I c

a Louisiana State University (United States)

b LOUISIANA STATE UNIVERSITY (United States)

c The University of Texas at Arlington (United States)

Author keywords

Chromium; Diamondlike carbon; Plasma processing and deposition; Tribology

Indexed keywords

CARBON; CHEMICAL MECHANICAL POLISHING; CHROMIUM; DIAMONDS; GLASS; NANOSTRUCTURED MATERIALS; SILICA; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY;

CHEMICAL INERTNESS; DIAMONDLIKE CARBON; PLASMA PROCESSING AND DEPOSITION; ULTRAVIOLET ILLUMINATION;

THIN FILMS;

EID: 23144432570 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.04.104 Document Type: Article

Times cited : (168)

References (43)

1
- 0000636111
- D.R. Tallant, J.E. Parmeter, M.P. Siegal, and R.L. Simpson Diamond Relat. Mater. 4 1995 191
- (1995) Diamond Relat. Mater. , vol.4 , pp. 191
- Tallant, D.R.¹ Parmeter, J.E.² Siegal, M.P.³ Simpson, R.L.⁴

2
- 0001762077
- Z.L. Akkerman, H. Efstathiadis, and F.W. Smith J. Appl. Phys. 80 5 1996 3068
- (1996) J. Appl. Phys. , vol.80 , Issue.5 , pp. 3068
- Akkerman, Z.L.¹ Efstathiadis, H.² Smith, F.W.³

3
- 0031187890
- Y. Liu, and E.I. Meletis J. Mater. Sci. 32 1997 3491
- (1997) J. Mater. Sci. , vol.32 , pp. 3491
- Liu, Y.¹ Meletis, E.I.²

4
- 0032643752
- A. Varma, V. Palshin, K. Fountzoulas, and E.I. Meletis Surf. Eng. 15 4 1999 301
- (1999) Surf. Eng. , vol.15 , Issue.4 , pp. 301
- Varma, A.¹ Palshin, V.² Fountzoulas, K.³ Meletis, E.I.⁴

5
- 0026138019
- S. Miyake, R. Kaneko, Y. Kikuya, and I. Sugimoto ASME J. Tribol. 113 1991 384
- (1991) ASME J. Tribol. , vol.113 , pp. 384
- Miyake, S.¹ Kaneko, R.² Kikuya, Y.³ Sugimoto, I.⁴

6
- 0026870358
- K. Oguri, and T. Arai J. Mater. Res. 7 6 1992 1313
- (1992) J. Mater. Res. , vol.7 , Issue.6 , pp. 1313
- Oguri, K.¹ Arai, T.²

7
- 24044501197
- S. Miyake, I. Sugimoto, and R. Kaneko Proceedings of the Japanese International Tribology Conference, Nagoya, Japan vol. 1 1990 25
- (1990) Proceedings of the Japanese International Tribology Conference, Nagoya, Japan , vol.1 , pp. 25
- Miyake, S.¹ Sugimoto, I.² Kaneko, R.³

8
- 0000164894
- C.P. Klages, and R. Memming Mat. Sci. Forum 52/53 1989 609
- (1989) Mat. Sci. Forum , vol.52-53 , pp. 609
- Klages, C.P.¹ Memming, R.²

9
- 0033892101
- Y.L. Su, and W.H. Kao J. Mater. Eng. Perform. 9 1 2000 38
- (2000) J. Mater. Eng. Perform. , vol.9 , Issue.1 , pp. 38
- Su, Y.L.¹ Kao, W.H.²

10
- 0025535294
- M. Fryda, K. Taube, and C.-P. Klages Vacuum 41 1990 1291
- (1990) Vacuum , vol.41 , pp. 1291
- Fryda, M.¹ Taube, K.² Klages, C.-P.³

11
- 0033373452
- A.A. Voevodin, J.P. O'Neill, and J.S. Zabinski Surf. Coat. Technol. 119 1999 36
- (1999) Surf. Coat. Technol. , vol.119 , pp. 36
- Voevodin, A.A.¹ O'Neill, J.P.² Zabinski, J.S.³

12
- 0026407578
- H. Dimigen, and C.-P. Klages Surf. Coat. Technol. 49 1991 543
- (1991) Surf. Coat. Technol. , vol.49 , pp. 543
- Dimigen, H.¹ Klages, C.-P.²

13
- 0001740955
- W.J. Meng, and B.A. Gillispe J. Appl. Phys. 84 1998 4314
- (1998) J. Appl. Phys. , vol.84 , pp. 4314
- Meng, W.J.¹ Gillispe, B.A.²

14
- 0344106274
- A.A. Voevodin, M.A. Capano, A.J. Safriet, M.S. Donley, and J.S. Sabinski Appl. Phys. Lett. 69 1996 188
- (1996) Appl. Phys. Lett. , vol.69 , pp. 188
- Voevodin, A.A.¹ Capano, M.A.² Safriet, A.J.³ Donley, M.S.⁴ Sabinski, J.S.⁵

15
- 0000435970
- A.A. Voevodin, S.V. Prasad, and J.S. Zabinski J. Appl. Phys. 82 1997 855
- (1997) J. Appl. Phys. , vol.82 , pp. 855
- Voevodin, A.A.¹ Prasad, S.V.² Zabinski, J.S.³

16
- 85119560432
- K. Bewilogua, and C.V. Cooper Surf. Coat. Technol. 132 2000 275
- (2000) Surf. Coat. Technol. , vol.132 , pp. 275
- Bewilogua, K.¹ Cooper, C.V.²

17
- 4243260057
- P. Willich, and U. Wischmann Microchim. Acta 132 2000 419
- (2000) Microchim. Acta , vol.132 , pp. 419
- Willich, P.¹ Wischmann, U.²

18
- 0001719728
- A.A. Voevodin, J.P. O'Neill, S.V. Prasad, and J.S. Zabinski J. Vac. Sci. Technol., A, Vac. Surf. Films 17 1999 986
- (1999) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.17 , pp. 986
- Voevodin, A.A.¹ O'Neill, J.P.² Prasad, S.V.³ Zabinski, J.S.⁴

19
- 0032651503
- O.R. Monteiro, M.-P. Delplancke-Ogletree, and I.G. Brown Thin Solid Films 342 1999 100
- (1999) Thin Solid Films , vol.342 , pp. 100
- Monteiro, O.R.¹ Delplancke-Ogletree, M.-P.² Brown, I.G.³

20
- 0026418949
- C. Benndorf, M. Fryda, C.P. Klages, K. Taube, and H.G. Haubold Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 140 1991 795
- (1991) Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. , vol.140 , pp. 795
- Benndorf, C.¹ Fryda, M.² Klages, C.P.³ Taube, K.⁴ Haubold, H.G.⁵

21
- 23144442935
- M. Sunkara, M. Wadsborn, E. Yeap, V. Ralchenko, B.N. Pypkin, M.L. Shubekin, and S.V. Babu Electrochemical Society Proceedings vol. 97 1997 297
- (1997) Electrochemical Society Proceedings , vol.97 , pp. 297
- Sunkara, M.¹ Wadsborn, M.² Yeap, E.³ Ralchenko, V.⁴ Pypkin, B.N.⁵ Shubekin, M.L.⁶ Babu, S.V.⁷

22
- 0033327768
- P. Koduri, M.K. Sunkara, E.C. Dickey, C. Frazier, and S.V. Babu Surf. Eng. 15 1999 373
- (1999) Surf. Eng. , vol.15 , pp. 373
- Koduri, P.¹ Sunkara, M.K.² Dickey, E.C.³ Frazier, C.⁴ Babu, S.V.⁵

23
- 0001382088
- X. Fan, E.C. Dickey, S.J. Pennycook, and M.K. Sunkara Appl. Phys. Lett. 75 1999 2740
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2740
- Fan, X.¹ Dickey, E.C.² Pennycook, S.J.³ Sunkara, M.K.⁴

24
- 0031097254
- A.A. Adjaottor, E. Ma, and E.I. Meletis Surf. Coat. Technol. 89 1997 197
- (1997) Surf. Coat. Technol. , vol.89 , pp. 197
- Adjaottor, A.A.¹ Ma, E.² Meletis, E.I.³

25
- 0001557121
- W.A. Lanford, H.P. Trautvetter, J.F. Ziegler, and J. Keller Appl. Phys. Lett. 28 1976 566
- (1976) Appl. Phys. Lett. , vol.28 , pp. 566
- Lanford, W.A.¹ Trautvetter, H.P.² Ziegler, J.F.³ Keller, J.⁴

26
- 23144445118
- F.L. Wang, J.C. Jiang, and E.I. Meletis J. Appl. Phys. 95 2004 2569
- (2004) J. Appl. Phys. , vol.95 , pp. 2569
- Wang, F.L.¹ Jiang, J.C.² Meletis, E.I.³

27
- 0036448408
- V. Singh, J. Jiang, and E.I. Meletis Mater. Res. Soc. Symp. 697 2002 249
- (2002) Mater. Res. Soc. Symp. , vol.697 , pp. 249
- Singh, V.¹ Jiang, J.² Meletis, E.I.³

28
- 0003536561
- P. Villars L.D. Calvert American Society for Metals Metals Park, Ohio
- W.B. Pearson Handbook of crystallographic data for intermetallic phases P. Villars L.D. Calvert 1985 American Society for Metals Metals Park, Ohio
- (1985) Handbook of Crystallographic Data for Intermetallic Phases
- Pearson, W.B.¹

29
- 0024128441
- K. Bewilogua, H.J. Heinitz, B. Rau, and S. Schultze Thin Solid Films 167 1988 233
- (1988) Thin Solid Films , vol.167 , pp. 233
- Bewilogua, K.¹ Heinitz, H.J.² Rau, B.³ Schultze, S.⁴

30
- 0031547789
- T. Fujihanac, Y. Okabe, and M. Iwaki Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 127-128 1997 660
- (1997) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms , vol.127-128 , pp. 660
- Fujihanac, T.¹ Okabe, Y.² Iwaki, M.³

31
- 49049125456
- K. Hohmuth, B. Rauschenbach, A. Kolitsch, and E. Richter Nucl. Instrum. Methods Phys. Res. 209-210 1983 249
- (1983) Nucl. Instrum. Methods Phys. Res. , vol.209-210 , pp. 249
- Hohmuth, K.¹ Rauschenbach, B.² Kolitsch, A.³ Richter, E.⁴

32
- 0038616019
- M. Cekada, M. Macek, D.K. Merl, and P. Panjan Thin Solid Films 433 2003 174
- (2003) Thin Solid Films , vol.433 , pp. 174
- Cekada, M.¹ MacEk, M.² Merl, D.K.³ Panjan, P.⁴

33
- 85059047588
- D.O.I. Kazuya, H. Satoshi, H. Kawasaki, and S. Yoshiaki Mater. Res. Soc. Symp. 617 2000 J7.8.1
- (2000) Mater. Res. Soc. Symp. , vol.617
- Kazuya, D.O.I.¹ Satoshi, H.² Kawasaki, H.³ Yoshiaki, S.⁴

34
- 2442660779
- C.T. Whelan J.H. McGuire
- V.G. Palshin, R. Tittsworth, J. Hormes, E.I. Meletis, X. Nie, and J. Jiang C.T. Whelan J.H. McGuire From the Atomic to the Nano-Scale 2002, Proceedings of the International Workshop, Old Dominion University, December 1-14 2002 99
- (2002) From the Atomic to the Nano-Scale 2002, Proceedings of the International Workshop, Old Dominion University, December 1-14 , pp. 99
- Palshin, V.G.¹ Tittsworth, R.² Hormes, J.³ Meletis, E.I.⁴ Nie, X.⁵ Jiang, J.⁶

35
- 0037091222
- V.A. Palshin, R.C. Tittsworth, K. Fountzoulas, and E.I. Meletis J. Mater. Sci. 37 2002 1535
- (2002) J. Mater. Sci. , vol.37 , pp. 1535
- Palshin, V.A.¹ Tittsworth, R.C.² Fountzoulas, K.³ Meletis, E.I.⁴

36
- 18844464247
- W.J. Meng, R.C. Tittsworth, and L.E. Rehn Thin Solid Films 377-378 2000 222
- (2000) Thin Solid Films , vol.377-378 , pp. 222
- Meng, W.J.¹ Tittsworth, R.C.² Rehn, L.E.³

37
- 0033317045
- D. Bourgoin, S. Turgeon, and G.G. Ross Thin Solid Films 357 1999 246
- (1999) Thin Solid Films , vol.357 , pp. 246
- Bourgoin, D.¹ Turgeon, S.² Ross, G.G.³

38
- 0013111962
- H. Goretzki, and Z. Fres Anal. Chem. 333 1989 451
- (1989) Anal. Chem. , vol.333 , pp. 451
- Goretzki, H.¹ Fres, Z.²

39
- 7544251380
- P. Gupta, V. Singh, and E.I. Meletis Tribol. Int. 37 2004 1019
- (2004) Tribol. Int. , vol.37 , pp. 1019
- Gupta, P.¹ Singh, V.² Meletis, E.I.³

40
- 49849125293
- L. Ramqvist J. Phys. Chem. Solids 30 1969 1835
- (1969) J. Phys. Chem. Solids , vol.30 , pp. 1835
- Ramqvist, L.¹

41
- 0032026026
- C. Donnet Surf. Coat. Technol. 100-101 1998 180
- (1998) Surf. Coat. Technol. , vol.100-101 , pp. 180
- Donnet, C.¹

42
- 0030184186
- Y. Liu, A. Erdemir, and E.I. Meletis Surf. Coat. Technol. 82 1996 48
- (1996) Surf. Coat. Technol. , vol.82 , pp. 48
- Liu, Y.¹ Erdemir, A.² Meletis, E.I.³

43
- 0034274402
- D.Y. Wang, K.W. Weng, and S.Y. Hwang Diamond Relat. Mater. 9 2000 1762
- (2000) Diamond Relat. Mater. , vol.9 , pp. 1762
- Wang, D.Y.¹ Weng, K.W.² Hwang, S.Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.