Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics

Volumn 89, Issue 9, 2001, Pages 4830-4835

  Yoon, S F ^a   Tan, K H ^a   Rusli, ^a   Ahn, J ^a   Huang, Q F ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035339543     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1359163     Document Type: Article

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