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Volumn 10, Issue 2, 2001, Pages 200-206
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Electronic properties of hydrogenated amorphous carbon films deposited using ECR-RF plasma method
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Author keywords
Amorphous carbon films; Electron spin resonance; Electronic properties
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Indexed keywords
ACTIVATION ENERGY;
ANNEALING;
CAPACITANCE;
ELECTRIC CONDUCTIVITY MEASUREMENT;
FERMI LEVEL;
FILM GROWTH;
GLOW DISCHARGES;
PARAMAGNETIC RESONANCE;
SUBSTRATES;
THERMAL EFFECTS;
PLASMA METHODS;
AMORPHOUS FILMS;
CARBON;
FILM;
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EID: 0035248126
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(00)00468-4 Document Type: Article |
Times cited : (23)
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References (29)
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