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Volumn 102, Issue 9, 2013, Pages

Energy band alignment of atomic layer deposited HfO2 on epitaxial (110)Ge grown by molecular beam epitaxy

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER; ATOMIC LAYER DEPOSITED; BAND ALIGNMENTS; CONDUCTION BAND OFFSET; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; ENERGY-BAND ALIGNMENT; SHARP INTERFACE; VALENCE BAND OFFSETS;

EID: 84875129029     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4794838     Document Type: Article
Times cited : (15)

References (37)
  • 1
    • 84875179961 scopus 로고    scopus 로고
    • International Technology Roadmafor Semiconductors (ITRS), Process Integration, Devices, and Structures (PIDS), 2011 edition (2011).
    • International Technology Roadmap for Semiconductors (ITRS), Process Integration, Devices, and Structures (PIDS), 2011 edition (2011).
  • 5
    • 84866488540 scopus 로고    scopus 로고
    • 10.1149/1.3700922
    • M. K. Hudait, ECS Trans. 45, 581 (2012). 10.1149/1.3700922
    • (2012) ECS Trans. , vol.45 , pp. 581
    • Hudait, M.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.