X-ray properties and interface study of B4C/Mo and B 4C/Mo2C periodic multilayers

Applied Physics A: Materials Science and Processing

Volumn 111, Issue 1, 2013, Pages 191-198

  Choueikani, F ^a,b   Bridou, F ^a   Lagarde, B ^b   Meltchakov, E ^a   Polack, F ^b   Mercere, P ^b   Delmotte, F ^a  

^a UNIV PARIS SUD   (France)

^b SYNCHROTRON SOLEIL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASYMMETRIC STRUCTURES; COMPARATIVE STUDIES; GRAZING INCIDENCE X-RAY REFLECTOMETRY; INTERDIFFUSION LAYER; INTERFACE STUDIES; INTERFACIAL LAYER; PERIODIC MULTILAYERS; SYMMETRIC STRUCTURES;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; PERIODIC STRUCTURES; X RAYS;

MULTILAYERS;

EID: 84874948054     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-013-7560-3     Document Type: Article

References (30)

1. E. Meltchakov C. Hecquet M. Roulliay S. De Rossi Y. Menesguen A. Jerome F. Bridou F. Varnière M.-F. Ravet-Krill F. Delmotte 2010 Development of Al-based multilayer optics for EUV Appl. Phys. A 98 111 117 2010ApPhA..98..111M 10.1007/s00339-009-5445-2
2. Y. Ménesguen S. De Rossi E. Meltchakov F. Delmotte 2010 Aperiodic multilayer mirrors for efficient broadband reflection in the extreme ultraviolet Appl. Phys. A 98 305 309 2010ApPhA..98..305M 10.1007/s00339-009-5400-2
3. M. Suman M. Pelizzo P. Nicolosi D.L. Windt 2008 Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography Appl. Opt. 47 2906 2914 2008ApOpt..47.2906S 10.1364/AO.47.002906
4. D.L. Windt S. Donguy J. Seely D. Kjornrattanawanich 2004 Experimental comparison of extreme-ultraviolet multilayers for solar physics Appl. Opt. 43 1835 1848 2004ApOpt..43.1835W 10.1364/AO.43.001835
5. F. Polack, M. Idir, E. Jourdain, A. Liard-Cloup, Two-dimensional diffraction network with alternating multilayer stacks and method for the production thereof and spectroscopic devices comprising said networks. European Patent Application EP1700141 (2005)
6. F. Polack, B. Lagarde, M. Idir, A. Liard-Cloup, E. Jourdain, M. Roulliay, Alternate multilayer gratings with enhanced diffraction efficiency in the 500-5000 eV energy domain, in Ninth International Conference on Synchrotron Radiation Instrumentation Daegu. AIP Conf. Proceedings Series, vol. 879 (2007), pp. 489-492
7. 4C multilayers for a 6.7 nm wavelength Appl. Opt. 50 1610 1619 2011ApOpt..50.1610B 10.1364/AO.50.001610
8. R.S. Rosen D.G. Stearns M.A. Viliardos M.E. Kassner S.P. Venon Y. Cheng 1993 Silicide layer growth rates in Mo/Si multilayers Appl. Opt. 32 6975 6980 1993ApOpt..32.6975R 10.1364/AO.32.006975
9. S. Braun H. Mai M. Moss R. Scholz A. Leson 2002 Mo/Si multilayers with different barrier layers for applications as extreme ultraviolet mirrors Jpn. J. Appl. Phys. 41 4074 4081 2002JaJAP..41.4074B 10.1143/JJAP.41.4074
10. J.M. Slaughter B.S. Medower R.N. Watts C. Tarrio T.B. Lucatorto C.M. Falco 1994 Si/B4C narrow-bandpass mirrors for extreme ultraviolet Opt. Lett. 19 1786 1788 1994OptL...19.1786S 10.1364/OL.19.001786
11. P. Zuppella G. Monaco A.J. Corso P. Nicolosi D.L. Windt V. Bello G. Mattei M.G. Pelizzo 2011 Iridium/silicon multilayers for extreme ultraviolet applications in the 20-35 nm wavelength range Opt. Lett. 36 1203 1205 2011OptL...36.1203Z 10.1364/OL.36.001203
12. D.L. Windt R. Hull W.K. Waskiewics 1992 Imperfections in metal/Si multilayers J. Appl. Phys. 71 2675 2678 1992JAP....71.2675W 10.1063/1.351040
13. 4C/Si multilayers deposited by rf-magnetron sputtering Appl. Surf. Sci. 238 262 268 2004ApSS..238..262P 10.1016/j.apsusc.2004.05.176
14. H. Maury J.-M. André J. Gautier F. Bridou F. Delmotte M.-F. Ravet-Krill P. Holliger P. Jonnard 2006 Physico-chemical study of the interfaces of Mo/Si multilayer interferential mirrors: correlation with the optical properties Surf. Interface Anal. 38 744 747 10.1002/sia.2248
15. 4C multilayers Thin Solid Films 514 278 286 2006TSF...514..278M 10.1016/j.tsf.2006.02.073
16. S. Bajt J.B. Alameda T.W. Barbee W.M. Clift J.A. Folta B. Kaufmann E.A. Spiller 2002 Improved reflectance and stability of Mo-Si multilayers Opt. Eng. 41 1797 1804 2002OptEn..41.1797B 10.1117/1.1489426
17. T. Bottger D.C. Meyer P. Paufler S. Braun M. Moss H. Mai E. Beyer 2003 Thermal stability of Mo/Si multilayers with boron carbide interlayers Thin Solid Films 444 165 173 2003TSF...444..165B 10.1016/S0040-6090(03)01028-9
18. 4C diffusion barrier layers Appl. Opt. 48 155 160 2009ApOpt..48..155N 10.1364/AO.48.000155
19. 2C/Be multilayers. US Patent Application US 6,229,652 B1 (2001)
20. 2C films as a diffusion barrier for copper metallization Appl. Surf. Sci. 255 3518 3522 2009ApSS..255.3518T 10.1016/j.apsusc.2008.09.076
21. J. Gautier F. Delmotte M. Roulliay F. Bridou M.-F. Ravet A. Jerome 2005 Study of normal incidence of three-component maltilayer mirrors in the range 20-40 nm Appl. Opt. 44 384 390 2005ApOpt..44..384G 10.1364/AO.44.000384
22. J. Gautier F. Delmotte F. Bridou M.-F. Ravet F. Varniere M. Rouilliay A. Jerome I. Vickridge 2007 Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics Appl. Phys. A 88 719 725 2007ApPhA..88..719G 10.1007/s00339-007-4041-6
23. M. Idir, P. Mercere, T. Moreno, A. Delmotte, P. Da Silva, M.H. Modi, Metrology and tests beamline at SOLEIL design and first results, in Tenth. International Conference on Radiation Instrumentation Melbourne. AIP Conf. Proceedings Series, vol. 1234 (2009), pp. 485-488
24. F. Bridou B. Pardo 1994 Grazing X-ray reflectometry data processing by Fourier transform J. X-Ray Sci. Technol. 4 200 216 10.1016/S0895-3996(05)80058-8
25. L. Nevot B. Pardo J. Corno 1988 Characterization of X-UV multilayers by grazing incidence X-ray reflectometry Rev. Phys. Appl. 23 1675 1686 10.1051/rphysap:0198800230100167500
26. F. Bridou B. Pardo 1990 Automatic characterisation of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry J. Opt. 21 183 191 1990JOpt...21..183B
27. http://henke.lbl.gov/optical-constants/getdb2.html
28. V.I.T.A. de Rooij-Lohmann A.W. Kleyn F. Bijkerk H.H. Brongersma A.E. Yakshin 2009 Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy Appl. Phys. Lett. 94 063107 2009ApPhL..94f3107D 10.1063/1.3081034
29. 4C/Si layered systems J. Appl. Phys. 108 014314 2010JAP...108a4314D 10.1063/1.3460107
30. 4C, B, and C with Mo/Si layered structures J. Appl. Phys. 108 094314 2010JAP...108i4314D 10.1063/1.3503521