Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

Applied Physics Letters

Volumn 94, Issue 6, 2009, Pages

  De Rooij Lohmann, V I T A ^a   Kleyn, A W ^a   Bijkerk, F ^a,b   Brongersma, H H ^c   Yakshin, A E ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c Calipso BV   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ULTRATHIN FILMS;

DEPTH-RESOLVED; DIFFUSION PROCESS; EXTREME ULTRA VIOLETS; HIGH SENSITIVITIES; ION DOSE; LOW ENERGY ION SCATTERINGS; LOW-ENERGY ION SPECTROSCOPIES; NANOSCALED;

IONS;

EID: 60349108263     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3081034     Document Type: Article

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