Physico-chemical study of the interfaces of Mo/Si multilayer interferential mirrors: Correlation with the optical properties

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 744-747

  Maury, H ^a   Andre J M ^a   Gautier, J ^b   Bridou, F ^b   Delmotte, F ^b   Ravet, M F ^b   Holliger, P ^c   Jonnard, P ^a  

^a SORBONNE UNIVERSITÉ   (France)

^b Systèmes et Composants Optiques   (France)

^c CEA LETI   (France)

Author keywords

Molybdenum; Multilayer; Silicon; Suicide; X ray emission; X ray reflectivity

Indexed keywords

COMPUTER SIMULATION; CORRELATION METHODS; INTERFACES (MATERIALS); MIRRORS; MOLYBDENUM; MULTILAYERS; OPTICAL PROPERTIES; SILICON;

SUICIDE; X-RAY EMISSION; X-RAY REFLECTIVITY;

LIGHT INTERFERENCE;

EID: 33646582671     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2248     Document Type: Conference Paper

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