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Volumn 113, Issue , 2013, Pages 106-113

The catalytic effect of iron(III) on the etching of ZnO:Al front contacts for thin-film silicon solar cells

Author keywords

Catalysis; Etching; Thin film Si solar cells; Transparent conductive oxide (TCO); ZnO thin films

Indexed keywords

APPLICATION-ORIENTED; LIGHT-SCATTERING INTENSITY; MICROSCOPIC CHARACTERIZATION; MORPHOLOGICAL FEATURES; THIN-FILM SI SOLAR CELLS; THIN-FILM SILICON SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDES; ZNO THIN FILM;

EID: 84874911071     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.01.045     Document Type: Article
Times cited : (5)

References (43)
  • 3
    • 0030172401 scopus 로고    scopus 로고
    • Growth of a-Si:H on transparent conductive oxides for solar cell applications
    • DOI 10.1016/0927-0248(95)00141-7
    • H.N. Wanka, M.B. Schubert, and E. Lotter Growth of a-Si:H on transparent conductive oxides for solar cell applications Solar Energy Materials and Solar Cells 41-42 1996 519 527 (Pubitemid 126357097)
    • (1996) Solar Energy Materials and Solar Cells , vol.41-42 , pp. 519-527
    • Wanka, H.N.1    Schubert, M.B.2    Lotter, E.3
  • 6
    • 33747362897 scopus 로고    scopus 로고
    • Electrical properties of transparent and conducting Ga doped ZnO
    • V. Bhosle, A. Tiwari, and J. Narayan Electrical properties of transparent and conducting Ga doped ZnO Journal of Applied Physics 100 2006 033713
    • (2006) Journal of Applied Physics , vol.100 , pp. 033713
    • Bhosle, V.1    Tiwari, A.2    Narayan, J.3
  • 9
    • 77956610515 scopus 로고    scopus 로고
    • Surface textured ZnO:Al thin films by pulsed DC magnetron sputtering for thin film solar cells applications
    • W.T. Yen, Y.C. Lin, and J.H. Ke Surface textured ZnO:Al thin films by pulsed DC magnetron sputtering for thin film solar cells applications Applied Surface Science 257 2010 960 968
    • (2010) Applied Surface Science , vol.257 , pp. 960-968
    • Yen, W.T.1    Lin, Y.C.2    Ke, J.H.3
  • 12
    • 34247266634 scopus 로고    scopus 로고
    • The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells
    • M. Berginski, J. Hüpkes, M. Schulte, G. Schöpe, H. Stiebig, B. Rech, and M. Wuttig The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells Journal of Applied Physics 101 2007 074903
    • (2007) Journal of Applied Physics , vol.101 , pp. 074903
    • Berginski, M.1    Hüpkes, J.2    Schulte, M.3    Schöpe, G.4    Stiebig, H.5    Rech, B.6    Wuttig, M.7
  • 14
    • 33847320705 scopus 로고    scopus 로고
    • 4Cl aqueous solution and its influence on optical and electrical properties
    • DOI 10.1016/j.apsusc.2006.11.036, PII S0169433206015078
    • 4Cl aqueous solution and its influence on optical and electrical properties Applied Surface Science 253 2007 5161 5165 (Pubitemid 46329822)
    • (2007) Applied Surface Science , vol.253 , Issue.11 , pp. 5161-5165
    • Sun, J.1    Bian, J.2    Liang, H.3    Zhao, J.4    Hu, L.5    Zhao, Z.6    Liu, W.7    Du, G.8
  • 15
    • 84858701683 scopus 로고    scopus 로고
    • 4Cl aqueous solution to texture ZnO:Al films for efficient light trapping in flexible thin film solar cells
    • 4Cl aqueous solution to texture ZnO:Al films for efficient light trapping in flexible thin film solar cells Thin Solid Films 520 2012 4144 4149
    • (2012) Thin Solid Films , vol.520 , pp. 4144-4149
    • Fernández, S.1    De Abril, O.2    Naranjo, F.B.3    Gandía, J.J.4
  • 17
    • 38949138104 scopus 로고    scopus 로고
    • A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film
    • DOI 10.1016/j.apsusc.2007.10.012, PII S0169433207014468
    • Y.C. Lin, Y.C. Jian, and J.H. Jiang A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film Applied Surface Science 254 2008 2671 2677 (Pubitemid 351222614)
    • (2008) Applied Surface Science , vol.254 , Issue.9 , pp. 2671-2677
    • Lin, Y.C.1    Jian, Y.C.2    Jiang, J.H.3
  • 18
    • 84855709918 scopus 로고    scopus 로고
    • High productivity combinatorial study of wet chemical texture etch of sputter deposited Al-doped ZnO thin films for thin film Si solar cells
    • N. Kumar, G. Zhang, N. Kalyankar, M.A. Nguyen, J. Li, H. Yang, and Z.-W. Sun High productivity combinatorial study of wet chemical texture etch of sputter deposited Al-doped ZnO thin films for thin film Si solar cells Photovoltaics International 9 2010 137 141
    • (2010) Photovoltaics International , vol.9 , pp. 137-141
    • Kumar, N.1    Zhang, G.2    Kalyankar, N.3    Nguyen, M.A.4    Li, J.5    Yang, H.6    Sun, Z.-W.7
  • 20
    • 84858142498 scopus 로고    scopus 로고
    • Development and research on the mechanism of novel mist etching method for oxide thin films
    • T. Kawaharamura, and T. Hirao Development and research on the mechanism of novel mist etching method for oxide thin films Japanese Journal of Applied Physics 51 2012 036503
    • (2012) Japanese Journal of Applied Physics , vol.51 , pp. 036503
    • Kawaharamura, T.1    Hirao, T.2
  • 22
    • 79957581890 scopus 로고    scopus 로고
    • New texture etching of zinc oxide: Tunable light trapping for Si thin film solar cells
    • Valencia, Spain, WIP, Munich
    • J. Hüpkes, J.I. Owen, E. Bunte, H. Zhu, S.E. Pust, J. Worbs, G. Jost, New texture etching of zinc oxide: tunable light trapping for Si thin film solar cells, in: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, Spain, WIP, Munich, 2010, pp. 3224-3227.
    • (2010) Proceedings of the 25th European Photovoltaic Solar Energy Conference , pp. 3224-3227
    • Hüpkes, J.1
  • 23
    • 79957582673 scopus 로고    scopus 로고
    • Etching modulated surface textures into sputtered ZnO:Al films
    • Valencia, Spain, WIP, Munich
    • J.I. Owen, J. Hüpkes, E. Bunte, S.E. Pust, A. Gordijn, Etching modulated surface textures into sputtered ZnO:Al films, in: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, Spain, WIP, Munich, 2010, pp. 2951-2955.
    • (2010) Proceedings of the 25th European Photovoltaic Solar Energy Conference , pp. 2951-2955
    • Owen, J.I.1
  • 24
    • 84894163444 scopus 로고    scopus 로고
    • Novel texturing method for sputtered zinc oxide films prepared at high deposition rate from ceramic tube targets
    • E. Bunte, H. Zhu, J. Hüpkes, and J. Owen Novel texturing method for sputtered zinc oxide films prepared at high deposition rate from ceramic tube targets EPJ Photovoltaics 2 2011 20602
    • (2011) EPJ Photovoltaics , vol.2 , pp. 20602
    • Bunte, E.1    Zhu, H.2    Hüpkes, J.3    Owen, J.4
  • 26
    • 78751647815 scopus 로고    scopus 로고
    • Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
    • H. Zhu, J. Hüpkes, E. Bunte, J. Owen, and S.M. Huang Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells Solar Energy Materials and Solar Cells 95 2011 964 968
    • (2011) Solar Energy Materials and Solar Cells , vol.95 , pp. 964-968
    • Zhu, H.1    Hüpkes, J.2    Bunte, E.3    Owen, J.4    Huang, S.M.5
  • 27
    • 84855679760 scopus 로고    scopus 로고
    • Chemical etching of zinc oxide for thin-film silicon solar cells
    • J. Hüpkes, J.I. Owen, S.E. Pust, and E. Bunte Chemical etching of zinc oxide for thin-film silicon solar cells ChemPhysChem 13 2012 66 73
    • (2012) ChemPhysChem , vol.13 , pp. 66-73
    • Hüpkes, J.1    Owen, J.I.2    Pust, S.E.3    Bunte, E.4
  • 30
    • 84855957731 scopus 로고    scopus 로고
    • Instabilities in reactive sputtering of ZnO:Al and reliable texture-etching solution for light trapping in silicon thin film solar cells
    • J. Hüpkes, H. Zhu, J.I. Owen, G. Jost, and E. Bunte Instabilities in reactive sputtering of ZnO:Al and reliable texture-etching solution for light trapping in silicon thin film solar cells Thin Solid Films 520 2012 1913 1917
    • (2012) Thin Solid Films , vol.520 , pp. 1913-1917
    • Hüpkes, J.1    Zhu, H.2    Owen, J.I.3    Jost, G.4    Bunte, E.5
  • 34
    • 84856389650 scopus 로고    scopus 로고
    • Gradient etching of silicon-based thin films for depth-resolved measurements: The example of Raman crystallinity
    • F. Köhler, S. Schicho, B. Wolfrum, A. Gordijn, S.E. Pust, and R. Carius Gradient etching of silicon-based thin films for depth-resolved measurements: the example of Raman crystallinity Thin Solid Films 520 2012 2605 2608
    • (2012) Thin Solid Films , vol.520 , pp. 2605-2608
    • Köhler, F.1    Schicho, S.2    Wolfrum, B.3    Gordijn, A.4    Pust, S.E.5    Carius, R.6
  • 40
    • 84874895832 scopus 로고    scopus 로고
    • Surface characterization of sputtered ZnO:Al for silicon thin-film solar cells
    • Valencia, Spain, WIP, Munich
    • G. Jost, E. Bunte, J. Worbs, H. Siekmann, J. Hüpkes, Surface characterization of sputtered ZnO:Al for silicon thin-film solar cells, in: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, Spain, WIP, Munich, 2010, pp. 3078-3082.
    • (2010) Proceedings of the 25th European Photovoltaic Solar Energy Conference , pp. 3078-3082
    • Jost, G.1
  • 41
    • 84874879567 scopus 로고    scopus 로고
    • Evaluation of textured TCOs for a-Si:H/μc-Si:H thin film solar cells by angular resolved light scattering measurements
    • Hamburg, Germany, WIP, Munich
    • W. Dewald, V. Sittinger, B. Szyszka, D. Wippler, J. Hüpkes, P. Obermeyer, F. Hamelmann, H. Stiebig, F. Säuberlich, D. Severin, S. Klein, M. Rhode, U. Schmidt, Evaluation of textured TCOs for a-Si:H/μc-Si:H thin film solar cells by angular resolved light scattering measurements, in: Proceedings of the 26th European Photovoltaic Solar Energy Conference, Hamburg, Germany, WIP, Munich, 2011, pp. 2704-2708.
    • (2011) Proceedings of the 26th European Photovoltaic Solar Energy Conference , pp. 2704-2708
    • Dewald, W.1
  • 42
    • 84874890346 scopus 로고    scopus 로고
    • Process control of texture-etched high-rate ZnO:Al front contact layers for application in silicon thin-film solar cells
    • G. Jost, T. Merdzhanova, T. Zimmermann, J. Hüpkes, Process control of texture-etched high-rate ZnO:Al front contact layers for application in silicon thin-film solar cells, in: Proceedings of the ICCG 9, Breda, The Netherlands, 2012.
    • (2012) Proceedings of the ICCG 9, Breda, the Netherlands
    • Jost, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.