A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film

Applied Surface Science

Volumn 254, Issue 9, 2008, Pages 2671-2677

  Lin, Y C ^a   Jian, Y C ^a   Jiang, J H ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

AZO film; Chemical stability; Transparent conducting film; Wet etching

Indexed keywords

ACTIVATION ENERGY; ALUMINUM; CHEMICAL STABILITY; OPTOELECTRONIC DEVICES; WET ETCHING; ZINC OXIDE;

TETRAMETHYLAMMONIUM HYDROXIDE (TMAH); TRANSPARENT CONDUCTING FILM;

THICK FILMS;

EID: 38949138104     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.012     Document Type: Article

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