ZnO etch-feature control via concentration and temperature of various acids

ECS Journal of Solid State Science and Technology

Volumn 1, Issue 1, 2012, Pages

  Owen, Jorj I ^a   Pust, Sascha E ^a   Bunte, Eerke ^a,b   Hüpkes, Jürgen ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Euroglas GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84874901756     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.013201jss     Document Type: Article

References (24)

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