Development of two-step etching approach for aluminium doped zinc oxide using a combination of standard HCl and NH4Cl etch steps

Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4678-4684

  Fernandez S ^a   Pust, S E ^b   Hupkes J ^b   Naranjo, F B ^c  

^a CIEMAT   (Spain)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

^c UNIVERSITY OF ALCALÁ   (Spain)

Author keywords

Etching method; NH4Cl; Scattering properties; Silicon thin solar cells; ZnO:Al

Indexed keywords

CL-CONCENTRATIONS; ETCH PROCESS; ETCHING METHOD; LIGHT-TRAPPING; NH4CL; RADIO FREQUENCY SPUTTERING; SCATTERING PROPERTY; SILICON THIN FILM; SURFACE FEATURE; TEXTURED FILMS; ZNO; ZNO:AL FILMS;

DOPING (ADDITIVES); LIGHT SCATTERING; SURFACE ROUGHNESS;

ZINC OXIDE;

EID: 84860286143     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.190     Document Type: Conference Paper

References (20)

1. A. Gordijn, J.K. Rath, and R.E.I. Schropp Prog. Photovoltaics Res. Appl. 14 2006 305
2. O. Kluth, B. Rech, L. Houben, S. Wieder, G. Schöpe, C. Beneking, H. Wagner, A. Löffl, and H.W. Schock Thin Solid Films 351 1999 247
3. J. Löffer, R. Groenen, J.L. Linden, M.C.M. van de Sanden, and R.E.I. Schropp Thin Solid Films 392 2001 315
4. J.W. Kwon, and E.S. Kim J. Microelectromech. Syst. 14 2005 603
5. G.X. -Yong, L.Q. -Geng, L.Y. -Fen, and L.J. -Xiao Braz. J. Phys. 38 2008 336
6. S.-H. Nam, M.-H. Kim, D.G. Yoo, S.H. Jeong, D.Y. Kim, N.-E. Lee, and J.-H. Boo Surf. Rev. Lett. 17 2010 121
7. J.I. Owen, J. Hüpkes, H. Zhu, E. Bunte, and S.E. Pust Phys. Status Solidi A 208 2011 109
8. M. Metha, and C. Meier J. Electromech. Soc. 158 2011 H119
9. J. Müller, B. Rech, J. Springer, and M. Vanecek Sol. Energy 77 2004 917
10. J. Hüpkes, B. Rech, O. Kluth, T. Repmann, B. Zwaygardt, J. Müller, R. Drese, and M. Wuttig Sol. Energy Mater. Sol. Cells 90 2006 3054
11. S.J. Tark, M.G. Kang, S. Park, J.H. Jang, J.C. Lee, W.M. Kim, J.S. Lee, and D. Kim Curr. Appl. Phys. 9 2009 1318
12. D.-W. Kang, S.-H. Kuk, K.-S. Ji, S.-W. Ahn, and M.-K. Han Phys. Status Solidi C 3-4 2010 925
13. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech Thin Solid Films 442 2003 80
14. S. Faÿ, L. Feitknecht, R. Schlüchter, U. Kroll, E. Vallat-Sauvain, and A. Shah Sol. Energy Mater. Sol. Cells 90 2006 2960
15. H. Zhu, J. Hüpkes, E. Bunte, J. Owen, and S.M. Huang Sol. Energy Mater. Sol. Cells 95 2011 964
16. M. Berginski, J. Hüpkes, M. Schulte, G. Schöpe, H. Stiebig, B. Rech, and M. Wuttig J. Appl. Phys. 101 2007 074903
17. T. Roschek, T. Repmann, J. Müller, B. Rech, and H. Wagner J. Vac. Sci. Technol., A 20 2002 492
18. B. Rech, T. Roschek, T. Repmann, J. Müller, R. Schmitz, and W. Appenzeller Thin Solid Films 427 2003 157
19. S. Fernández, O. de Abril, F.B. Naranjo, and J.J. Gandía Thin Solid Films 2011 10.1016/j.tsf.2011.04.207
20. J.I. Owen, J. Hüpkes, E. Bunte, S.E. Pust, and A. Gordijn Proceedings of the 25th EUPVSEC, Valencia, Spain 2010 2951