Self-lubricating SU-8 nanocomposites for microelectromechanical systems applications

Tribology Letters

Volumn 49, Issue 1, 2013, Pages 169-178

  Saravanan, Prabakaran ^a   Satyanarayana, Nalam ^a   Sinha, Sujeet K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Lubrication; MEMS; Polymer; Self lubrication

Indexed keywords

COEFFICIENT OF FRICTIONS; CURING PROPERTIES; FOUR-ORDER; LIQUID LUBRICANTS; MEMS APPLICATIONS; MEMS MATERIALS; PERFLUOROPOLYETHERS; SELF-LUBRICATING; SELF-LUBRICATION; WEAR LIFE;

ELECTROMECHANICAL DEVICES; LUBRICATION; MECHANICAL PROPERTIES; NANOCOMPOSITES; NANOPARTICLES; PHOTORESISTS; POLYMERS; TRIBOLOGY;

MEMS;

EID: 84874477220     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-012-0055-0     Document Type: Article

References (34)

1. Marinis, T.F.: The future of microelectromechanical systems (MEMS). Strain 45, 208-220 (2009)
2. Kim, S.H.; Asay, D.B.; Dugger, M.T.: Nanotribology and MEMS. NanoToday 2, 22-29 (2007) (Pubitemid 47471446)
3. de Boer, M.P.; Mayer, T.M.: Tribology of MEMS. MRS Bull. 4, 302-304 (2001) (Pubitemid 33588290)
4. Lee, K.K.; Bhushan, B.; Hansford, D.: Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications. J. Vac. Sci. Technol. A 23, 804-810 (2005) (Pubitemid 43119208)
5. Gelorme, J.D.; Cox, R.J.; Gutierrez, S.A.R.: Photoresist composition and printed circuit boards and packages made herewith. US Patent 4,882,245, 21 Nov 1989
6. Abgrall, P.; Conedera, V.; Camon, H.; Gue, A.-M.; Nguyen, N.T.: SU-8 as a structural material for labs-on-chips and microelectromechanical systems. Electrophoresis 28, 4539-4551 (2007)
7. Asay, D.B.; Dugger, M.T.; Ohlhausen, J.A.; Kim, S.H.: Macro- to nanoscale wear prevention via molecular adsorption. Langmuir 24, 155-159 (2008)
8. Asay, D.B.; Dugger, M.T.; Kim, S.H.: In situ vapor-phase lubrication of MEMS. Tribol. Lett. 29, 67-74 (2008)
9. Eapen, K.C.; Patton, S.T.; Smallwood, S.A.; Philips, B.S.; Zabinski, J.S.: MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation. J. Microelectromech. Syst. 14, 954-960 (2005) (Pubitemid 41568087)
10. Henck, S.A.: Lubrication of digital micromirror devices™. Tribol. Lett. 3, 239-247 (1997) (Pubitemid 27456945)
11. Knieling, T.; Lang, W.; Benecke, W.: Gas phase hydrophobisation of MEMS silicon structures with self-assembling monolayers for avoiding in-use sticking. Sens. Actuators B 126, 13-17 (2007) (Pubitemid 47374452)
12. Ma, J.Q.; Pang, C.J.; Mo, Y.F.; Bai, M.W.: Preparation and tribological properties of multiply-alkylated cyclopentane (MAC)-octadecyltrichlorosilane (OTS) double-layer film on silicon. Wear 263, 1000-1007 (2007) (Pubitemid 47284290)
13. Patton, S.T.; Eapen, K.C.; Zabinski, J.S.; Sanders, J.H.; Voevodin, A.A.: Lubrication of microelectromechanical systems radio frequency switch contacts using self-assembled monolayers. J. Appl. Phys. 102, 024903 (2007) (Pubitemid 47192021)
14. Patton, S.T.; Slocik, J.M.; Campbell, A.; Hu, J.; Naik, R.R.; Voevodin, A.A.: Bimetallic nanoparticles for surface modification and lubrication of MEMS switch contacts. Nanotechnology 19, 405705 (2008)
15. Prasad, S.V.; Scharf, T.W.; Kotula, P.G.; Michael, J.R.; Christenson, T.R.: Application of diamond-like nanocomposite tribological coatings on LIGA microsystem parts. J. Microelectromech. Syst. 18, 695-704 (2009)
16. Satyanarayana, N.; Sinha, S.K.: Tribology of PFPE overcoated self-assembled monolayers deposited on Si surface. J. Phys. D: Appl. Phys. 38, 3512-3522 (2005) (Pubitemid 41277569)
17. Satyanarayana, N.; Sinha, S.K.; Lim, S.-C.: Highly wear resistant chemisorbed polar ultra-high-molecular-weight polyethylene thin film on Si surface for micro-system applications. J. Mater. Res. 24, 3331-3337 (2009)
18. Scharf, T.W.; Prasad, S.V.; Dugger, M.T.; Kotula, P.G.; Goeke, R.S.; Grubbs, R.K.: Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS. Acta Mater. 54, 4731-4743 (2006) (Pubitemid 44441947)
19. Sidorenko, A.; Ahn, H.-S.; Kim, D.-I.; Yang, H.; Tsukruk, V.V.: Wear stability of polymer nanocomposite coatings with trilayer architecture. Wear 252, 946-955 (2002) (Pubitemid 34805917)
20. Jiguet, S.; Judelewicz, M.; Mischler, S.; Hofmann, H.; Bertsch, A.; Renaud, P.: SU-8 nanocomposite coatings with improved tribological performance for MEMS. Surf. Coat. Technol. 201, 2289-2295 (2006) (Pubitemid 44742910)
21. Jiguet, S.; Judelewicz, M.; Mischler, S.; Bertch, A.; Renaud, P.: Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts. Microelectron. Eng. 83, 1273-1276 (2006)
22. Singh, R.A.; Satyanarayana, N.; Kustandi, T.S.; Sinha, S.K.: Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices. J. Phys. D: Appl. Phys. 44, 015301 (2011)
23. Singh, R.A.; Satyanarayana, N.; Sinha, S.K.: Surface chemical modification for exceptional wear life of MEMS materials. AIP Adv. 1, 042141 (2011)
24. Voigt, A.; Heinrich, M.; Martin, C.; Liobera, A.; Gruetzner, G.; Perez-Murano, F.: Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS. Microelectron. Eng. 84, 1075-1079 (2007) (Pubitemid 46678341)
25. Chiamori, H.C.; Brown, J.W.; Adhiprakasha, E.V.; Hantsoo, E.T.; Straalsund, J.B.; Melosh, N.A.; Pruitt, B.L.: Suspension of nanoparticles in SU-8: processing and characterization of nanocomposite polymers. Microelectron. J. 39, 228-236 (2008) (Pubitemid 351163272)
26. Mionic, M.; Jiguat, S.; Judelewicz, M.; Karimi, A.; Forro, L.; Magrez, A.: Study of the mechanical response of carbon nanotubes-SU8 composites by nanoindentation. Phys. Status Solidi B 247, 3072-3075 (2010)
27. Okhlopkova, A.A.; Pertrova, P.N.; Popov, S.N.; Fedorov, A.L.: Tribological materials based on polytetrafluoroethylene modified by a liquid lubricant. J. Frict. Wear 29, 133-136 (2008)
28. Puukilainen, E.; Saarenpää, H.; Pakkanen, T.A.: Compression-molded, lubricant-treated UHMWPE composites. J. Appl. Polym. Sci. 104, 1762-1768 (2007) (Pubitemid 46587779)
29. Guo, Q.B.; Lau, K.T.; Zheng, B.F.; Rong, M.Z.; Zhang, M.Q.: Imparting ultra-low friction and wear rate to epoxy by the incorporation of microencapsulated lubricant? Macromol. Mater. Eng. 294, 20-24 (2009)
30. 2 coatings deposited on the laser textured surface. Wear 278-279, 77-82 (2012)
31. Neidhardt, J.; Hultman, L.; Broitman, E.; Scharf, T.W.; Singer, I.L.: Structural, mechanical and tribological behavior of fullerene-like and amorphous carbon nitride coatings. Diam. Relat. Mater. 13, 1882-1888 (2004)
32. Sugimoto, I.; Miyake, S.: Solid lubricating fluorine-containing polymer film synthesized by perfluoropolyether sputtering. Thin Solid Films 158, 51-60 (1988) (Pubitemid 18589357)
33. Constantin, F.; Fenouillot, F.; Pascault, J.-.P.; Williams, R.J.J.: Post-crosslinkable blends: reactions between a linear poly(hydroxyl-amino ether) and a diepoxy. Macromol. Mater. Eng. 289, 1027-1032 (2004)
34. Surface Coatings Association of Australia. (ed.) Surface Coatings: Raw Materials and Their Usage, vol. 1. Chapman & Hall, London (1993). ISBN 0412552108