SU-8 nanocomposite coatings with improved tribological performance for MEMS

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2289-2295

  Jiguet, S ^a   Judelewicz, M ^a   Mischler, S ^b   Hofmann, H ^b   Bertsch, A ^b   Renaud, P ^b  

^a Gersteltec Sarl   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

Composites; Epoxy; Friction and wear; MEMS; Nanoparticles; SU8

Indexed keywords

CERAMIC MATRIX COMPOSITES; CRYSTAL MICROSTRUCTURE; FRICTION; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; TRIBOLOGY; WEAR RESISTANCE;

NANOCOMPOSITE COATINGS; PHOTORESIST LAYERS; WEAR RATES;

COATINGS;

CERAMIC MATRIX COMPOSITES; COATINGS; CRYSTAL MICROSTRUCTURE; FRICTION; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; TRIBOLOGY; WEAR RESISTANCE;

EID: 33750972566     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.03.041     Document Type: Article

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