Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices

Journal of Physics D: Applied Physics

Volumn 44, Issue 1, 2011, Pages

  Singh, R A ^a   Satyanarayana, N ^a   Kustandi, T S ^b   Sinha, S K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COEFFICIENT OF FRICTIONS; COST EFFECTIVE; ELECTRO-MECHANICAL; FABRICATION PROCESS; MATERIAL REMOVAL; MEMS/NEMS; MINIATURIZED DEVICES; OPERATING LIFETIME; OXYGEN PLASMA TREATMENTS; PERFLUOROPOLYETHERS; STEP SURFACE; STRUCTURAL MATERIALS; SU-8 POLYMER; SURFACE MODIFICATION; TIME DURATION; TRIBOLOGICAL PERFORMANCE; TWO STEP METHOD;

DURABILITY; FRICTION; MATERIALS; OXYGEN; PLASMA APPLICATIONS; POLYMERIC FILMS;

SURFACES;

EID: 78650661839     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/1/015301     Document Type: Article

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