SCOPUS 정보 검색 플랫폼

AIP Advances

Volumn 1, Issue 4, 2011, Pages

Surface chemical modification for exceptional wear life of MEMS materials

(3) Singh, R Arvind a Satyanarayana, N a Sinha, Sujeet Kumar a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL MODIFICATION; COST EFFECTIVENESS; ETHANOLAMINES; FRICTION; PLASTIC COATINGS; SODIUM COMPOUNDS; SURFACE TREATMENT; THICK FILMS; THIN FILMS; WEAR OF MATERIALS;

COEFFICIENT OF FRICTIONS; FRICTION COEFFICIENTS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MINIATURIZED DEVICES; PERFLUOROPOLYETHERS; SODIUM PHOSPHATE BUFFER; SURFACE CHEMICAL MODIFICATIONS; THREE ORDERS OF MAGNITUDE;

MEMS;

EID: 84855302045 PISSN: None EISSN: 21583226 Source Type: Journal
DOI: 10.1063/1.3662096 Document Type: Article

Times cited : (24)

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