The effects of high-energy electron beam irradiation on the properties of IGZO thin films prepared by rf magnetron sputtering

Journal of Ceramic Processing Research

Volumn 13, Issue SPL. ISS.2, 2012, Pages

  Jung, S H ^a   Moon, H J ^a   Ryu, M K ^b   Cho, K I ^b   Bae, B S ^a   Yun, E J ^a  

^a Hoseo University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Hall measurements; High energy electron beam irradiation (HEEBI); Indium gallium zinc oxide (IGZO) films; Photoluminescence; Radio frequency (rf) magnetron sputtering; X ray photoelectron spectroscopy

Indexed keywords

EID: 84874204509     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (28)

1. G. H. Kim, H. S. Kim, H. S. Shin, B. D. Ahn, K. H. Kim, H. J. Kim, Thin Solid Films 517 (2009) 4007-10.
2. H. S. Shin, B. D. Ahn, K. H. Kim, J.-S. Park, H. J. Kim, Thin Solid Films 517 (2009) 6349-52.
3. D.-Y. Cho, J. Song, C. S. Hwang, W. S. Choi, T. W. Noh, J.-Y. Kim, H.-G. Lee, B.-G. Park, S.-Y. Cho, S.-J. Oh, J. H. Jeong, J. K. Jeong, Y.-G. Mo, Thin Solid Films 518 (2009) 1079-81.
4. T. Aoi, N. Oka, Y. Sato, R. Hayashi, H. Kumomi, Y. Shigesato, Thin Solid Films 518 (2010) 3004-07.
5. S. W. Tsao, T. C. Chang, S. Y. Huang, M. C. Chen, S. C. Chen, C. T. Tsai, Y. J. Kuo, Y. C. Chen, W Wu, Solid-State Electron. 54 (2010) 1497-99.
6. Y. Kikuchi, K. Nomura, H. Yanagi, T. Kamiya, M. Hirano, H. Hosono, Thin Solid Films 518 (2010) 3017-21.
7. S.-Y. Huang, T.-C. Chang, S. Y. Huang, M.-C. Chen, S.-W. Tsao, S.-C. Chen, C.-T. Tsai, H.-P. Lo, Solid-State Electron. 61 (2011) 96-99.
8. S.-J. Jeon, J.-W. Chang, K.-S. Choi, J. P. Kar, T.-I. Lee, J.-M. Myoung, Enhancement in electrical performance of indium gallium zinc oxide-based thin film transistors by low temperature thermal annealing. Mat. Sci. Semicond. Process. (2011), doi: 10. 1016/j. mssp. (2011. 02. 012.).
9. D. U. Lee, E. K. Kim, B. C. Lee, D. K. Oh, J. Korean Phys. Soc. 50 [6] (2007) 1904-07.
10. D. U. Lee, E. K. Kim, B. C. Lee, D. K. Oh, Thin Solid Films 516 [11] (2008) 3482-85.
11. L. S. Vlasenko, G. D. Watkins, Phys. Rev. B 71 (2005) 125210.
12. E. Gür, H. Asil, C. Cothkun, S. Tüzemen, K. Meral, Y. Onganer, K. Therifodlu, Nucl. Instr. and Meth. in Phys. Res. B 266 [9] (2008) 2021-26.
13. E.-J. Yun, J. W. Jung, C. I. Cheon, J. S. Kim, Y. H. Han, M.-W. Kim, B. C. Lee, J. Mater. Res. 24 [5] (2009) 1785-90.
14. E.-J. Yun, J. W. Jung, Y. H. Han, M.-W. Kim, B. C. Lee, J. Appl. Phys. 105 [12] (2009) 123509.
15. E.-J. Yun, J. W. Jung, Y. H. Han, M-W. Kim, B. C. Lee, J. Korean Phys. Soc. 56 [12] (2010) 356-61.
16. E.-J. Yun, J. W. Jung, B. C. Lee, J. Alloys Compd. 496 [1-2] (2010) 543-47.
17. E-J. Yun, J. W. Jung, K. N. Ko, J. Hwang, B. C. Lee, M-H. Jung, Thin Solid Films 518 (2010) 6236-40.
18. Y. J. Li, Y. W. Kwon, M. Jones, Y. W. Heo, J. Zhou, S. C. Luo, P. H. Holloway, E. Douglas, D. P. Norton, Z. Park, S. Li, Semicond. Sci. Technol. 20 (2005) 720.
19. D. C. Paine, B. Yaglioglu, Z. Beiley, S. Lee, Thin Solid Films 516 [17] (2008) 5894-98.
20. K.-H. Lee, N.-I. Cho, E.-J. Yun, H. G. Nam, Appl. Surf. Sci. 256 [13] (2010) 4241-45.
21. E.-J. Yun, J. W. Jung, B. C. Lee, M. Jung, Surf. Coat. Technol. 205 [21-22] (2011) 5130-34.
22. X. Q. Wei, B. Y. Man, M. Liu, C. S. Xue, H. Z. Zhuang, C. Yang, Physica B 388 [1-2] (2007) 145-52.
23. J.-H. Jeon, J. Kim, M.-K. Ryu, J. Korean Phys. Soc. 58 (2011) 158-62.
24. Y.-J. Lin, C.-L. Tsai, Y.-M. Lu, C.-J. Liu, J. Appl. Phys. 99 [9] (2006) 093501.
25. D. H. Fan, Z. Y. Ning, M. F. Jiang, Appl. Surf. Sci. 245 [1-4] (2005) 414-19.
26. E.-J. Yun, H.-S. Park, K. H. Lee, H. G. Nam, M. Jung, J. Appl. Phys. 103 [7] (2008) 073507.
27. H. Priller, M. Decker, R. Hauschild, H. Kalt, C. Klingshirn, Appl. Phys. Lett. 86 [11] (2005) 111909.
28. B. Kumar, H. Gong, R. Akkipeddi, J. Appl. Phys. 97 [6] (2005) 063706.