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Journal of Applied Physics

Volumn 105, Issue 12, 2009, Pages

Effect of high-energy electron beam irradiation on the properties of ZnO thin films prepared by magnetron sputtering

(5) Yun, Eui Jung a Jung, Jin Woo a Han, Young Hwan b Kim, Min Wan b Lee, Byung Cheol b

a Hoseo University (South Korea)

b Korea Atomic Energy Research Institute (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AS-GROWN FILMS; CRYSTALLINITY; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; GRAIN SIZE; HIGH DOSE; HIGH ENERGY ELECTRON BEAM IRRADIATION; IN-DIFFUSION; LOW DOSE; N-TYPE CONDUCTIVITY; P-TYPE CONDUCTIVITY; PHOTOLUMINESCENCE MEASUREMENTS; ROOM TEMPERATURE; SI DIFFUSION; SPUTTERING TECHNIQUES; ZINC VACANCY; ZNO FILMS; ZNO THIN FILM;

ELECTRIC PROPERTIES; ELECTRON BEAMS; ELECTRONS; FIELD EMISSION; FILM PREPARATION; IRRADIATION; MAGNETRONS; METALLIC FILMS; OPTICAL PROPERTIES; OXYGEN; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ZINC COMPOUNDS; SILICON COMPOUNDS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 67650227423 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3149783 Document Type: Conference Paper

Times cited : (37)

References (30)

1
- 38349141536
- 0003-6951,. 10.1063/1.2827588
- S. H. Cha, M. S. Oh, K. H. Lee, S. -I. Im, B. H. Lee, and M. M. Sung, Appl. Phys. Lett. 0003-6951 92, 023506 (2008). 10.1063/1.2827588
- (2008) Appl. Phys. Lett. , vol.92 , pp. 023506
- Cha, S.H.¹ Oh, M.S.² Lee, K.H.³ Im, S.-I.⁴ Lee, B.H.⁵ Sung, M.M.⁶

2
- 34248399209
- 0003-6951,. 10.1063/1.2723543
- D. -H. Kang, H. Lim, C. -J. Kim, I. -H. Song, J. -C. Park, Y. -S. Park, and J. -H. Chung, Appl. Phys. Lett. 0003-6951 90, 192101 (2007). 10.1063/1.2723543
- (2007) Appl. Phys. Lett. , vol.90 , pp. 192101
- Kang, D.-H.¹ Lim, H.² Kim, C.-J.³ Song, I.-H.⁴ Park, J.-C.⁵ Park, Y.-S.⁶ Chung, J.-H.⁷

3
- 35649020699
- 0003-6951,. 10.1063/1.2803219
- S. J. Lim, S. -J. Kwon, H. -J. Kim, and J. -S. Park, Appl. Phys. Lett. 0003-6951 91, 183517 (2007). 10.1063/1.2803219
- (2007) Appl. Phys. Lett. , vol.91 , pp. 183517
- Lim, S.J.¹ Kwon, S.-J.² Kim, H.-J.³ Park, J.-S.⁴

4
- 31644432535
- 0021-8979,. 10.1063/1.2161419
- H. P. He, F. Zhuge, Z. Z. Ye, L. P. Zhu, F. Z. Wang, B. H. Zhao, and J. Y. Huang, J. Appl. Phys. 0021-8979 99, 023503 (2006). 10.1063/1.2161419
- (2006) J. Appl. Phys. , vol.99 , pp. 023503
- He, H.P.¹ Zhuge, F.² Ye, Z.Z.³ Zhu, L.P.⁴ Wang, F.Z.⁵ Zhao, B.H.⁶ Huang, J.Y.⁷

5
- 33750700009
- 0003-6951,. 10.1063/1.2364865
- H. S. Kang, G. H. Kim, D. L. Kim, H. W. Chang, B. D. Ahn, and S. Y. Lee, Appl. Phys. Lett. 0003-6951 89, 181103 (2006). 10.1063/1.2364865
- (2006) Appl. Phys. Lett. , vol.89 , pp. 181103
- Kang, H.S.¹ Kim, G.H.² Kim, D.L.³ Chang, H.W.⁴ Ahn, B.D.⁵ Lee, S.Y.⁶

6
- 33750623727
- 0167-577X,. 10.1016/j.matlet.2006.04.001
- Y. J. Zeng, Z. Z. Ye, W. Z. Xu, B. Liu, Y. Che, L. P. Zhu, and B. H. Zhao, Mater. Lett. 0167-577X 61, 41 (2007). 10.1016/j.matlet.2006.04.001
- (2007) Mater. Lett. , vol.61 , pp. 41
- Zeng, Y.J.¹ Ye, Z.Z.² Xu, W.Z.³ Liu, B.⁴ Che, Y.⁵ Zhu, L.P.⁶ Zhao, B.H.⁷

7
- 33947191519
- 0009-2614,. 10.1016/j.cplett.2007.02.036
- F. Zhuge, L. P. Zhu, Z. Z. Ye, J. G. Lu, H. P. He, and B. H. Zhao, Chem. Phys. Lett. 0009-2614 437, 203 (2007). 10.1016/j.cplett.2007.02.036
- (2007) Chem. Phys. Lett. , vol.437 , pp. 203
- Zhuge, F.¹ Zhu, L.P.² Ye, Z.Z.³ Lu, J.G.⁴ He, H.P.⁵ Zhao, B.H.⁶

8
- 33746087601
- 0374-4884.
- D. H. Kong, W. C. Choi, Y. C. Shin, J. H. Park, and T. G. Kim, J. Korean Phys. Soc. 0374-4884 48, 1214 (2006).
- (2006) J. Korean Phys. Soc. , vol.48 , pp. 1214
- Kong, D.H.¹ Choi, W.C.² Shin, Y.C.³ Park, J.H.⁴ Kim, T.G.⁵

9
- 42149184128
- 0021-8979,. 10.1063/1.2901050
- E. -J. Yun, H. -S. Park, K. H. Lee, H. G. Nam, and M. Jung, J. Appl. Phys. 0021-8979 103, 073507 (2008). 10.1063/1.2901050
- (2008) J. Appl. Phys. , vol.103 , pp. 073507
- Yun, E.-J.¹ Park, H.-S.² Lee, K.H.³ Nam, H.G.⁴ Jung, M.⁵

10
- 33751202980
- 0921-4526,. 10.1016/j.physb.2006.05.346
- X. Q. Wei, B. Y. Man, M. Liu, C. S. Xue, H. Z. Zhuang, and C. Yang, Physica B 0921-4526 388, 145 (2007). 10.1016/j.physb.2006.05.346
- (2007) Physica B , vol.388 , pp. 145
- Wei, X.Q.¹ Man, B.Y.² Liu, M.³ Xue, C.S.⁴ Zhuang, H.Z.⁵ Yang, C.⁶

11
- 42649124030
- 0925-8388,. 10.1016/j.jallcom.2007.03.071
- G. Z. Xing, B. Yao, C. X. Cong, T. Yang, Y. P. Xie, B. H. Li, and D. Z. Shen, J. Alloys Compd. 0925-8388 457, 36 (2008). 10.1016/j.jallcom.2007.03.071
- (2008) J. Alloys Compd. , vol.457 , pp. 36
- Xing, G.Z.¹ Yao, B.² Cong, C.X.³ Yang, T.⁴ Xie, Y.P.⁵ Li, B.H.⁶ Shen, D.Z.⁷

12
- 84883188181
- 0021-4922,. 10.1143/JJAP.28.L2112
- H. Amano, M. Kito, and K. Hiramatsu, Jpn. J. Appl. Phys., Part 2 0021-4922 28, L2112 (1989). 10.1143/JJAP.28.L2112
- (1989) Jpn. J. Appl. Phys., Part 2 , vol.28 , pp. 2112
- Amano, H.¹ Kito, M.² Hiramatsu, K.³

13
- 0026942917
- 0021-4922,. 10.1143/JJAP.31.3662
- J. A. V. Vechten, J. D. Zook, R. D. Horning, and B. Goldenberg, Jpn. J. Appl. Phys., Part 1 0021-4922 31, 3662 (1992). 10.1143/JJAP.31.3662
- (1992) Jpn. J. Appl. Phys., Part 1 , vol.31 , pp. 3662
- Vechten, J.A.V.¹ Zook, J.D.² Horning, R.D.³ Goldenberg, B.⁴

14
- 0000247785
- 0003-6951,. 10.1063/1.117045
- X. Li and J. J. Coleman, Appl. Phys. Lett. 0003-6951 69, 1605 (1996). 10.1063/1.117045
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1605
- Li, X.¹ Coleman, J.J.²

15
- 34547240154
- 0374-4884.
- D. U. Lee, E. K. Kim, B. C. Lee, and D. K. Oh, J. Korean Phys. Soc. 0374-4884 50, 1904 (2007).
- (2007) J. Korean Phys. Soc. , vol.50 , pp. 1904
- Lee, D.U.¹ Kim, E.K.² Lee, B.C.³ Oh, D.K.⁴

16
- 40649094999
- 0040-6090,. 10.1016/j.tsf.2007.08.050
- D. U. Lee, E. K. Kim, B. C. Lee, and D. K. Oh, Thin Solid Films 0040-6090 516, 3482 (2008). 10.1016/j.tsf.2007.08.050
- (2008) Thin Solid Films , vol.516 , pp. 3482
- Lee, D.U.¹ Kim, E.K.² Lee, B.C.³ Oh, D.K.⁴

17
- 20144369109
- 0163-1829,. 10.1103/PhysRevB.71.125210
- L. S. Vlasenko and G. D. Watkins, Phys. Rev. B 0163-1829 71, 125210 (2005). 10.1103/PhysRevB.71.125210
- (2005) Phys. Rev. B , vol.71 , pp. 125210
- Vlasenko, L.S.¹ Watkins, G.D.²

18
- 33646881103
- 0021-8979,. 10.1063/1.2193649
- Y. -J. Lin, C. -L. Tsai, Y. -M. Lu, and C. -J. Liu, J. Appl. Phys. 0021-8979 99, 093501 (2006). 10.1063/1.2193649
- (2006) J. Appl. Phys. , vol.99 , pp. 093501
- Lin, Y.-J.¹ Tsai, C.-L.² Lu, Y.-M.³ Liu, C.-J.⁴

19
- 17044429418
- 0169-4332,. 10.1016/j.apsusc.2004.10.037
- D. H. Fan, Z. Y. Ning, and M. F. Jiang, Appl. Surf. Sci. 0169-4332 245, 414 (2005). 10.1016/j.apsusc.2004.10.037
- (2005) Appl. Surf. Sci. , vol.245 , pp. 414
- Fan, D.H.¹ Ning, Z.Y.² Jiang, M.F.³

20
- 18044392737
- 0003-6951,. 10.1063/1.1882746
- H. Priller, M. Decker, R. Hauschild, H. Kalt, and C. Klingshirn, Appl. Phys. Lett. 0003-6951 86, 111909 (2005). 10.1063/1.1882746
- (2005) Appl. Phys. Lett. , vol.86 , pp. 111909
- Priller, H.¹ Decker, M.² Hauschild, R.³ Kalt, H.⁴ Klingshirn, C.⁵

21
- 33744933942
- 0921-4526,. 10.1016/j.physb.2006.02.032
- S. W. Xue, X. T. Zu, W. G. Zheng, M. Y. Chen, and X. Xiang, Physica B 0921-4526 382, 201 (2006). 10.1016/j.physb.2006.02.032
- (2006) Physica B , vol.382 , pp. 201
- Xue, S.W.¹ Zu, X.T.² Zheng, W.G.³ Chen, M.Y.⁴ Xiang, X.⁵

22
- 36048994990
- 0921-4526,. 10.1016/j.physb.2007.08.187
- M. A. Reshchikov, H. Morkoc, B. Nemeth, J. Nause, J. Xie, B. Hertog, and A. Osinsky, Physica B 0921-4526 401-402, 358 (2007). 10.1016/j.physb.2007.08.187
- (2007) Physica B , vol.401-402 , pp. 358
- Reshchikov, M.A.¹ Morkoc, H.² Nemeth, B.³ Nause, J.⁴ Xie, J.⁵ Hertog, B.⁶ Osinsky, A.⁷

23
- 34547503787
- 0924-0136,. 10.1016/j.jmatprotec.2007.04.029
- H. -Y. Tsai, J. Mater. Process. Technol. 0924-0136 192-193, 55 (2007). 10.1016/j.jmatprotec.2007.04.029
- (2007) J. Mater. Process. Technol. , vol.192-193 , pp. 55
- Tsai, H.-Y.¹

24
- 0003406742
- (Wiley, New York),.
- C. Kittel, Introduction to Solid State Physics (Wiley, New York, 1986), p. 76.
- (1986) Introduction to Solid State Physics , pp. 76
- Kittel, C.¹

25
- 67650251570
- NIST XPS Database, Selected Element Search Result.
- NIST XPS Database, Selected Element Search Result; http://srdata.nist. gov/xps.

26
- 0003427458
- (Addison-Wesley, Reading, MA),.
- B. D. Cullity, Elements of X-ray Diffraction (Addison-Wesley, Reading, MA, 1978), p. 102.
- (1978) Elements of X-ray Diffraction , pp. 102
- Cullity, B.D.¹

27
- 41949134839
- 0374-4884.
- E. -J. Yun, H. -S. Park, K. -H. Cha, K. H. Lee, N. -I. Cho, and H. G. Nam, J. Korean Phys. Soc. 0374-4884 52, 606 (2008).
- (2008) J. Korean Phys. Soc. , vol.52 , pp. 606
- Yun, E.-J.¹ Park, H.-S.² Cha, K.-H.³ Lee, K.H.⁴ Cho, N.-I.⁵ Nam, H.G.⁶

28
- 47249086763
- 0957-4484,. 10.1088/0957-4484/19/31/315202
- Y. -J. Kim, J. Yoo, B. -H. Kwon, Y. J. Hong, C. -H. Lee, and G. -C. Yi, Nanotechnology 0957-4484 19, 315202 (2008). 10.1088/0957-4484/19/31/315202
- (2008) Nanotechnology , vol.19 , pp. 315202
- Kim, Y.-J.¹ Yoo, J.² Kwon, B.-H.³ Hong, Y.J.⁴ Lee, C.-H.⁵ Yi, G.-C.⁶

29
- 9444226963
- 0340-255X.
- V. V. Kislyuk, M. M. Osipyonok, G. M. Strilchuk, P. M. Lytvyn, and V. Z. Lozovski, Prog. Colloid Polym. Sci. 0340-255X 125, 24 (2004).
- (2004) Prog. Colloid Polym. Sci. , vol.125 , pp. 24
- Kislyuk, V.V.¹ Osipyonok, M.M.² Strilchuk, G.M.³ Lytvyn, P.M.⁴ Lozovski, V.Z.⁵

30
- 67650272722
- Wacklepedia-The Free Encyclopedia.
- Wacklepedia-The Free Encyclopedia, http://www.wacklepedia.com/z/zi/zinc. html.

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