Heated atomic force cantilever closed loop temperature control and application to high speed nanotopography imaging

Sensors and Actuators, A: Physical

Volumn 192, Issue , 2013, Pages 27-33

  Somnath, Suhas ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscope (AFM); Cantilever; Nanotopography; Temperature control

Indexed keywords

AFM; ANALOG CIRCUITRY; ATOMIC FORCE; ATOMIC FORCE MICROSCOPE CANTILEVERS; CANTILEVER; CLOSED LOOPS; CLOSED-LOOP FEEDBACK; CONTROL ARCHITECTURE; IMAGE SURFACE; LARGE ARRAYS; NANOTOPOGRAPHIES; THERMAL SIGNALS; TOPOGRAPHY IMAGING;

ANALOG CIRCUITS; BANDWIDTH; NANOCANTILEVERS; NANOTECHNOLOGY; TEMPERATURE CONTROL;

ATOMIC FORCE MICROSCOPY;

EID: 84872286472     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.11.030     Document Type: Article

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