Improved nanotopography sensing via temperature control of a heated atomic force microscope cantilever

IEEE Sensors Journal

Volumn 11, Issue 11, 2011, Pages 2664-2670

  Somnath, Suhas ^a   Corbin, Elise A ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscope (AFM); cantilever; nanotopography; sensitivity; temperature control

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPE CANTILEVERS; CANTILEVER; CIRCUIT BEHAVIORS; CLOSED-LOOP CONTROL; CONTROL SCHEMES; ELECTRICAL CIRCUIT; ELECTRICAL RESISTANCES; INDIVIDUAL COMPONENTS; NANOTOPOGRAPHIES; ORDERS OF MAGNITUDE; SENSITIVITY; SENSITIVITY IMPROVEMENTS; SILICON GRATINGS; TEMPERATURE DEPENDENT; TOPOGRAPHY MEASUREMENT; TOPOGRAPHY SENSING;

CLOSED LOOP CONTROL SYSTEMS; MICROSCOPES; NANOCANTILEVERS; NANOTECHNOLOGY; TEMPERATURE CONTROL; TOPOGRAPHY;

ATOMIC FORCE MICROSCOPY;

EID: 80054857054     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2157121     Document Type: Article

References (25)

1. G. Binnig, C. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, pp. 930-933, 1986.
2. S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, P. K. Hansma, M. Longmire, and J. Gurley, "An atomic-force microscope implemented using an optical-lever," J. Appl. Phys., vol. 65, pp. 164-167, 1989.
3. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M. Lantz, H. Rothuizen, and R. Stutz, "The" millipede"-nanotechnology entering data storage," IEEE Trans. Nanotechnol., vol. 1, no. 1, pp. 39-55, Mar. 2002.
4. J. Lee and W. P. King, "Improved all-silicon microcantilever heaters with integrated piezoresistive sensing," J. Microelectromech. Syst., vol. 17, pp. 432-445, 2008.
5. J. Harley and T. Kenny, "High-sensitivity piezoresistive cantilevers under 1000 Å thick," Appl. Phys. Lett., vol. 75, p. 289, 1999.
6. C.Williams and H.Wickramasinghe, "Scanning thermal profiler," Microelectron. Eng., vol. 5, pp. 509-513, 1986.
7. K. Kim, K. Park, J. Lee, Z. Zhang, and W. King, "Nanotopographical imaging using a heated atomic force microscope cantilever probe," Sensors and Actuators A: Phys., vol. 136, pp. 95-103, 2007. (Pubitemid 46590661)
8. W. King, T. Kenny, K. Goodson, G. Cross, M. Despont, U. Dürig, H. Rothuizen, G. Binnig, and P. Vettiger, "Atomic force microscope cantilevers for combined thermomechanical data writing and reading," Appl. Phys. Lett., vol. 78, p. 1300, 2001.
9. K. Park, J. Lee, Z. Zhang, and W. King, "Topography imaging with a heated atomic force microscope cantilever in tapping mode," Rev. Sci. Instrum., vol. 78, p. 043709, 2007.
10. W. King, "Design analysis of heated atomic force microscope cantilevers for nanotopography measurements," J. Micromech. Microeng., vol. 15, p. 2441, 2005.
11. W. King, T. Kenny, and K. Goodson, "Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements," Appl. Phys. Lett., vol. 85, p. 2086, 2004.
12. A. Sebastian and D. Wiesmann, "Modeling and experimental identification of silicon microheater dynamics: A systems approach," J. Microelectromech. Syst., vol. 17, pp. 911-920, 2008.
13. J. H. Lee and Y. B. Gianchandani, "High-resolution scanning thermal probe with servocontrolled interface circuit for microcalorimetry and other applications," Rev. Sci. Instrum., vol. 75, pp. 1222-1227, 2004.
14. R. J. Cannara, A. Sebastian, B. Gotsmann, and H. Rothuizen, "Scanning thermal microscopy for fast multiscale imaging and manipulation," IEEE Trans. Nanotechnol., vol. 9, no. 6, pp. 745-753, Nov. 2010.
15. J. Lee, T. Beechem, T. Wright, B. Nelson, S. Graham, and W. King, "Electrical, thermal, and mechanical characterization of silicon microcantilever heaters," J. Microelectromech. Syst., vol. 15, pp. 1644-1655, 2006. (Pubitemid 44921783)
16. B. A. Nelson and W. P. King, "Temperature calibration of heated silicon atomic force microscope cantilevers," Sensors and Actuators A: Phys., vol. 140, pp. 51-59, 2007. (Pubitemid 47375059)
17. K. Park, G. L. W. Cross, Z. M. Zhang, and W. P. King, "Experimental investigation on the heat transfer between a heated microcantilever and a substrate," J. Heat Transf., vol. 130, pp. 102401-102409, 2008.
18. D.Wang, V. K.Kodali, W. D. Underwood, J. E. Jarvholm, T. Okada, S. C. Jones, M. Rumi, Z. Dai, W. P. King, S. R. Marder, J. E. Curtis, and E. Riedo, "Nanolithography: Thermochemical nanolithography of multifunctional nanotemplates for assembling nano-objects (Adv. funct. mater. 23/2009)," Adv. Funct. Mater., vol. 19, pp. 3696-3702, 2009.
19. Z. Wei, D. Wang, S. Kim, S.-Y. Kim, Y. Hu, M. K. Yakes, A. R. Laracuente, Z. Dai, S. R. Marder, C. Berger, W. P. King, W. A. de Heer, P. E. Sheehan, and E. Riedo, "Nanoscale tunable reduction of graphene oxide for graphene electronics," Science, vol. 328, pp. 1373-1376, 2010.
20. D. Pires, J. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, H. Wolf, M. Despont, U. Duerig, and A. Knoll, "Nanoscale three-dimensional patterning of molecular resists by scanning probes," Science, vol. 328, p. 732, 2010.
21. B. Nelson, W. King, A. Laracuente, P. Sheehan, and L. Whitman, "Direct deposition of continuous metal nanostructures by thermal dip-pen nanolithography," Appl. Phys. Lett., vol. 88, p. 033104, 2006.
22. P. Sheehan, L. Whitman, W. King, and B. Nelson, "Nanoscale deposition of solid inks via thermal dip pen nanolithography," Appl. Phys. Lett., vol. 85, p. 1589, 2004.
23. P. C. Fletcher, J. R. Felts, Z. Dai, T. D. Jacobs, H. Zeng, W. Lee, P. E. Sheehan, J. A. Carlisle, R. W. Carpick, and W. P. King, "Wearresistant diamond nanoprobe tips with integrated silicon heater for tipbased nanomanufacturing," ACS Nano, vol. 4, pp. 3338-3344, 2010.
24. B. Gotsmann and U. Dürig, "Thermally activated nanowear modes of a polymer surface induced by a heated tip," Langmuir, vol. 20, pp. 1495-1500, 2004.
25. B. A. Nelson and W. P. King, "Measuring material softening with nanoscale spatial resolution using heated silicon probes," Rev. Sci. Instrum., vol. 78, pp. 023702-023708, 2007.