Real-time models of electrostatically actuated cantilever probes with integrated thermal sensor for nanoscale interrogation

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 83-98

  Agarwal, Pranav ^a   Sahoo, Deepak R ^b   Sebastian, Abu ^b   Pozidis, Haris ^b   Salapaka, Murti V ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Characterization; Data storage; Dynamic mode; Electrostatic actuation; Microcantilever; Microheater; Millipede; Modeling; Probe based; Tapping mode; Thermal sensing

Indexed keywords

DATA STORAGE; ELECTROSTATIC ACTUATION; MICRO-CANTILEVERS; MICROHEATER; MODELING; PROBE-BASED; TAPPING MODES; THERMAL SENSING;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DAMPING; DATA STORAGE EQUIPMENT; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; HEATING EQUIPMENT; PROBES;

NANOCANTILEVERS;

EID: 76349087826     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2037340     Document Type: Article

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