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Volumn 51, Issue 11 PART2, 2012, Pages

Improving crystallinity of thin Si film for low-energy-loss micro-/nano-electromechanical systems devices by metal-induced lateral crystallization using biomineralized Ni nanoparticles

(9) Kumagai, Shinya a,c Murase, Hiromu a Miyachi, Syusuke a Kojima, Nobuaki a Ohshita, Yoshio a Yamaguchi, Masafumi a Yamashita, Ichiro b,c Uraoka, Yukiharu b,c Sasaki, Minoru a,c

a TOYOTA TECHNOLOGICAL INSTITUTE (Japan)

b NARA INSTITUTE OF SCIENCE AND TECHNOLOGY (Japan)

c JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SI FILMS; APOFERRITIN; CRYSTALLINE ORIENTATIONS; CRYSTALLINITIES; ELECTROSTATICALLY DRIVEN; JAPAN SOCIETY OF APPLIED PHYSICS; MEMS RESONATORS; MEMS/NEMS; METAL-INDUCED LATERAL CRYSTALLIZATION; NI NANOPARTICLES; POLY-SI FILMS; POLYCRYSTALLINE-SI; Q-FACTORS; SI FILMS;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; FREQUENCY RESPONSE; METAL NANOPARTICLES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NEMS; POLYSILICON;

AMORPHOUS SILICON;

EID: 84871371079 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.11PA03 Document Type: Conference Paper

Times cited : (4)

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