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Volumn 50, Issue 4 PART 2, 2011, Pages

Positional control of crystal grains in silicon thin film utilizing cage-shaped protein

Author keywords

[No Author keywords available]

Indexed keywords

3-AMINOPROPYLTRIETHOXYSILANE; CONTROLLED DEPOSITION; CRYSTAL GRAINS; CRYSTAL NUCLEI; ELECTROSTATIC INTERACTIONS; LOCATION CONTROL; METAL CATALYST; NICKEL NANOPARTICLES; POSITIONAL CONTROL; POSITIVELY CHARGED; RANDOMLY DISTRIBUTED; SEMICONDUCTOR PROCESSING TECHNOLOGIES; SILICON THIN FILM;

EID: 79955427488     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.04DL12     Document Type: Article
Times cited : (11)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.