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Volumn 50, Issue 4 PART 2, 2011, Pages
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Positional control of crystal grains in silicon thin film utilizing cage-shaped protein
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Author keywords
[No Author keywords available]
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Indexed keywords
3-AMINOPROPYLTRIETHOXYSILANE;
CONTROLLED DEPOSITION;
CRYSTAL GRAINS;
CRYSTAL NUCLEI;
ELECTROSTATIC INTERACTIONS;
LOCATION CONTROL;
METAL CATALYST;
NICKEL NANOPARTICLES;
POSITIONAL CONTROL;
POSITIVELY CHARGED;
RANDOMLY DISTRIBUTED;
SEMICONDUCTOR PROCESSING TECHNOLOGIES;
SILICON THIN FILM;
ADSORPTION;
CATALYSTS;
CRYSTALLIZATION;
ELECTROSTATICS;
NANOPARTICLES;
OPTIMIZATION;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON OXIDES;
THIN FILMS;
VAPOR DEPOSITION;
AMORPHOUS SILICON;
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EID: 79955427488
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.50.04DL12 Document Type: Article |
Times cited : (11)
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References (11)
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