Atomic force microscopy based manipulation of graphene using dynamic plowing lithography

Nanotechnology

Volumn 24, Issue 1, 2013, Pages

  Vasić, Borislav ^a   Kratzer, Markus ^b   Matković, Aleksandar ^a   Nevosad, Andreas ^b   Ralević, Uroš ^a   Jovanović, Djordje ^a   Ganser, Christian ^b,c   Teichert, Christian ^b   Gajić, Radoš ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF LEOBEN   (Austria)

^c GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM PROBE; AFM TIP; APPLIED FORCES; CONDUCTIVE AFM; ELECTRICAL CHARACTERIZATION; GRAPHENE SHEETS; KELVIN PROBE FORCE MICROSCOPY; LOCAL STRAINS; SILICONDIOXIDE SUBSTRATES; TAPPING-MODE ATOMIC FORCE MICROSCOPY;

ATOMIC FORCE MICROSCOPY; LITHOGRAPHY; NANOPROBES; PROBES;

GRAPHENE;

EID: 84870518722     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/1/015303     Document Type: Article

References (48)

1. Han M Y, Özyilmaz B, Zhang Y and Kim P 2007 Energy band-gap engineering of graphene nanoribbons Phys. Rev. Lett. 98 206805 (Pubitemid 47139572)
2. Stampfer C, Güttinger J, Hellmüller S, Molitor F, Ensslin K and Ihn T 2009 Energy gaps in etched graphene nanoribbons Phys. Rev. Lett. 102 056403
3. Pedersen T G, Flindt C, Pedersen J, Jauho A-P, Mortensen N A and Pedersen K 2008 Optical properties of graphene antidot lattices Phys. Rev. B 77 245431
4. Kim M, Safron N S, Han E, Arnold M S and Gopalan P 2010 Fabrication and characterization of large-area, semiconducting nanoperforated graphene materials Nano Lett. 10 1125
5. Liang X, Jung Y-S, Wu S, Ismach A, Olynick D L, Cabrini S and Bokor J 2010 Formation of bandgap and subbands in graphene nanomeshes with sub-10 nm ribbon width fabricated via nanoimprint lithography Nano Lett. 10 2454
6. Bai J, Zhong X, Jiang S, Huang Y and Duan X 2010 Graphene nanomesh Nat. Nanotechnol. 5 190
7. Pereira V M and Castro Neto A H 2009 Strain engineering of graphene's electronic structure Phys. Rev. Lett. 103 046801
8. Castro Neto A H and Novoselov K 2011 Two-dimensional crystals: beyond graphene Mater. Express 1 10
9. Pereira V M, Ribeiro R M, Peres N M R and Castro Neto A H 2010 Optical properties of strained graphene Europhys. Lett. 92 67001
10. Guinea F, Katsnelson M I and Geim A K 2010 Energy gaps and a zero-field quantum hall effect in graphene by strain engineering Nat. Phys. 6 30
11. Levy N, Burke S A, Meaker K L, Panlasigui M, Zettl A, Guinea F, Castr Neto A H and Crommie M F 2010 Strain-induced pseudo-magnetic fields greater than 300 T in graphene nanobubbles Science 329 544
12. Xie X N, Chung H J, Sow C H and Wee A T S 2006 Nanoscale materials patterning and engineering by atomic force microscopy nanolithography Mater. Sci. Eng. R 54 1 (Pubitemid 44894827)
13. Rosa L G and Liang J 2009 Atomic force microscope nanolithography: dip-pen, nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography J. Phys. Condens. Matter 21 483001
14. Giesbers A J M, Zeitler U, Neubeck S, Freitag F, Novoselov K S and Maan J C 2008 Nanolithography and manipulation of graphene using an atomic force microscope Solid State Commun. 147 366
15. Weng L, Zhang L, Chen Y P and Rokhinson L P 2008 Atomic force microscope local oxidation nanolithography of graphene Appl. Phys. Lett. 93 093107
16. Masubuchi S, Ono M, Yoshida K, Hirakawa K and Machida T 2009 Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope Appl. Phys. Lett. 94 082107
17. Masubuchi S, Arai M and Machida T 2011 Atomic force microscopy based tunable local anodic oxidation of graphene Nano Lett. 11 4542
18. Neubeck S, Freitag F, Yang R and Novoselov K S 2010 Scanning probe lithography on graphene Phys. Status Solidi b 247 2904
19. Puddy R K, Scard P H, Tyndall D, Connolly M R, Smith C G, Jones G A C, Lombardo A, Ferrari A C and Buitelaar M R 2011 Atomic force microscope nanolithography of graphene: cuts, pseudocuts, and tip current measurements Appl. Phys. Lett. 98 133120
20. Byun I-S et al 2011 Nanoscale lithography on monolayer graphene using hydrogenation and oxidation ACS Nano 5 6417
21. Rius G, Camara N, Godignon P, Perez-Murano F and Mestres N 2009 Nanostructuring of epitaxial graphene layers on SiC by means of field-induced atomic force microscopy modification J. Vac. Sci. Technol. B 27 3149
22. Alaboson J M P, Wang Q H, Kellar J A, Park J, Elam J W, Pellin M J and Hersam M C 2011 Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions Adv. Mater. 23 2181
23. Tapaszto L, Dobrik G, Lambin Ph and Biro L P 2008 Tailoring the atomic structure of graphene nanoribbons by scanning tunnelling microscope lithography Nat. Nano. 3 397
24. Eilers S and Rabe J P 2009 Manipulation of graphene within a scanning force microscope Phys. Status Solidi. B 246 2527
25. Wendel M, Kuhn S, Lorenz H, Kotthaus J P and Holland M 1994 Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devices Appl. Phys. Lett. 65 1775
26. Klehn B and Kunze U 1999 Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing J. Appl. Phys. 85 3897
27. Kunze U 2002 Invited review nanoscale devices fabricated by dynamic ploughing with an atomic force microscope Superlattices Microstruct. 31 3 (Pubitemid 34987407)
28. Heyde M, Rademann K, Cappella, Geuss M, Sturm H, Spangenberg T and Niehus H 2001 Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope Rev. Sci. Instrum. 72 136 (Pubitemid 33705910)
29. Novoselov K S, Jiang D, Schedin F, Booth T J, Khotkevich V V, Morozov S V and Geim A K 2005 Two-dimensional atomic crystals Proc. Natl. Acad. Sci. USA 102 10451 (Pubitemid 41061574)
30. Hutter J L and Bechhoefer J 1993 Calibration of atomic-force microscope tips Rev. Sci. Instrum. 64 1868
31. Matei G A, Thoreson E J, Pratt J R, Newell D B and Burnham N A 2006 Precision and accuracy of thermal calibration of atomic force microscopy cantilevers Rev. Sci. Instrum. 77 083703
32. Stark R W, Drobek T and Heckl W M 2001 Thermomechanical noise of a free v-shaped cantilever for atomic-force microscopy Ultramicroscopy 86 207 (Pubitemid 32098271)
33. Cappella B and Sturm H 2002 Comparison between dynamic plowing lithography and nanoindentation methods J. Appl. Phys. 91 506 (Pubitemid 34047305)
34. Datta S S, Strachan D R, Mele E J and Johnson A T C 2009 Surface potentials and layer charge distributions in few-layer graphene films Nano Lett. 9 7
35. Verdaguer A, Cardellach M, Segura J J, Sacha G M, Moser J, Zdrojek M, Bachtold A and Fraxedas J 2009 Charging and discharging of graphene in ambient conditions studied with scanning probe microscopy Appl. Phys. Lett. 94 233105
36. Yu Y-J, Zhao Y, Ryu S, Brus L E, Kim K S and Kim P 2009 Tuning the graphene work function by electric field effect Nano Lett. 9 3430
37. Nonnenmacher M, O'Boyle M P and Wickramasinghe H K 1991 Kelvin probe force microscopy Appl. Phys. Lett. 58 2921
38. Teichert C and Beinik I 2011 Conductive atomic-force microscopy investigation of nanostructures in microelectronics Scanning Probe Microscopy in Nanoscience and Nanotechonology vol 2 ed B Bhushan (Berlin: Springer) pp 691-721
39. O'Shea S J, Atta R M, Murrell M P and Welland M E 1995 Conducting atomic force microscopy study of silicon dioxide breakdown J. Vac. Sci. Technol. B 13 1945
40. 2 Appl. Phys. Lett. 73 3114 (Pubitemid 128677330)
41. Kremmer S, Teichert C, Pischler E, Gold H, Kuchar F and Schatzmayr M 2002 Characterization of silicon gate oxides by conducting atomic force microscopy Surf. Interface Anal. 33 168 (Pubitemid 34180149)
42. Martínez N F and García R 2006 Measuring phase shifts and energy dissipation with amplitude modulation atomic force microscopy Nanotechnology 17 S167
43. Kurra N, Prakash G, Basavaraja S, Fisher T S, Kulkarni G U and Reifenberger R G 2011 Charge storage in mesoscopic graphitic islands fabricated using AFM bias lithography Nanotechnology 22 245302
44. Lee C, Wei X, Kysar J W and Hone J 2008 Measurement of the elastic properties and intrinsic strength of monolayer graphene Science 321 385 (Pubitemid 352029970)
45. Ni Z H, Yu T, Lu Y H, Wang Y Y, Feng Y P and Shen Z X 2008 Uniaxial strain on graphene: Raman spectroscopy study and band-gap opening ACS Nano 2 2301
46. Villarrubia J S 1994 Morphological estimation of tip geometry for scanned probe microscopy Surf. Sci. 321 287
47. Mohiuddin T M G et al 2009 Uniaxial strain in graphene by Raman spectroscopy: G Peak splitting, Gruneisen parameters, and sample orientation Phys. Rev. B 79 205433
48. Yano T, Unouye Y and Kawata S 2006 Nanoscale uniaxial pressure effect of a carbon nanotube bundle on tip-enhanced near-field Raman spectra Nano Lett. 6 1269 (Pubitemid 44013493)