Nanoscale lithography on monolayer graphene using hydrogenation and oxidation

ACS Nano

Volumn 5, Issue 8, 2011, Pages 6417-6424

  Byun, Ik Su ^a   Yoon, Duhee ^b   Choi, Jin Sik ^a   Hwang, Inrok ^a   Lee, Duk Hyun ^a   Lee, Mi Jung ^a   Kawai, Tomoji ^a,c   Son, Young Woo ^d   Jia, Quanxi ^a,e   Cheong, Hyeonsik ^b   Park, Bae Ho ^a  

^a Konkuk University   (South Korea)

^b Sogang University   (South Korea)

^c OSAKA UNIVERSITY   (Japan)

^d Korea Institute for Advanced Study   (South Korea)

^e LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

atomic force microscope; graphene hydrogenation; graphene oxidation; nanoscale lithography; Raman spectroscopy

Indexed keywords

ATMOSPHERIC CONDITIONS; ATOMIC FORCE MICROSCOPE LITHOGRAPHY; ATOMIC FORCE MICROSCOPES; ELECTRONIC DEVICE; ENERGY BANDGAPS; FRICTION VALUES; GAS TREATMENT; GRAPHENE DEVICES; GRAPHENE NANORIBBONS; MICRO RAMAN SPECTROSCOPY; NANO SCALE; NANOSCALE DEVICE; NANOSCALE LITHOGRAPHY; NANOSCALE PATTERNING; ROOM TEMPERATURE; WET PROCESS;

ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; ELECTROMECHANICAL DEVICES; ELECTRON DEVICES; ENERGY GAP; ETCHING; HYDROGENATION; LITHOGRAPHY; MONOLAYERS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDATION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; TRANSPORT PROPERTIES;

GRAPHENE;

EID: 80052053963     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn201601m     Document Type: Article

References (34)

1. Balog, R.; Jørgensen, B.; Nilsson, L.; Andersen, M.; Rienks, E.; Bianchi, M.; Fanetti, M.; Lægsgaard, E.; Baraldi, A.; Lizzit, S. et al. Bandgap Opening in Graphene Induced by Patterned Hydrogen Adsorption Nat. Mater. 2010, 9, 315-319
2. Son, Y.-W.; Cohen, M. L.; Louie, S. G. Energy Gaps in Graphene Nanoribbons Phys. Rev. Lett. 2006, 97, 216803
3. Rotenberg, E.; Bostwick, A.; Ohta, T.; McChesney, J. L.; Seyller, T.; Horn, K. Origin of the Energy Bandgap in Epitaxial Graphene Nat. Mater. 2008, 7, 258-259
4. Liu, L.; Ryu, S.; Tomasik, M. R.; Stolyarova, E.; Jung, N.; Hybertsen, M. S.; Steigerwald, M. L.; Brus, L. E.; Flynn, G. W. Graphene Oxidation: Thickness-Dependent Etching and Strong Chemical Doping Nano Lett. 2008, 8, 1965-1970
5. Elias, D. C.; Nair, R. R.; Mohiuddin, T. M. G.; Morozov, S. V.; Blake, P.; Halsall, M. P.; Ferrari, A. C.; Boukhvalov, D. W.; Katsnelson, M. I.; Geim, A. K. et al. Control of Graphene's Properties by Reversible Hydrogenation: Evidence for Graphane Science 2009, 323, 610-613
6. Geim, A. K.; Novoselov, K. S. The Rise of Graphene Nat. Mater. 2007, 6, 183-191 (Pubitemid 46353764)
7. Pereira, V. M.; Castro Neto, A. H.; Peres, N. M. R. Tight-Binding Approach to Uniaxial Strain in Graphene Phys. Rev. B 2009, 80, 045401
8. Sofo, J. O.; Chaudhari, A. S.; Barber, G. D. Graphane: A Two-Dimensional Hydrocarbon Phys. Rev. B 2007, 75, 153401
9. Ryu, S.; Han, M. Y.; Maultzsch, J.; Heinz, T. F.; Kim, P.; Steigerwald, M. L.; Brus, L. E. Reversible Basal Plane Hydrogenation of Graphene Nano Lett. 2008, 8, 4597-4602
10. Li, X.; Wang, X.; Zhang, L.; Lee, S.; Dai, H. Chemically Derived, Ultrasmooth Graphene Nanoribbon Semiconductors Science 2008, 319, 1229-1232 (Pubitemid 351323015)
11. Han, M. Y.; Ozyilmaz, B.; Zhang, Y.; Kim, P. Energy Band-Gap Engineering of Graphene Nanoribbons Phys. Rev. Lett. 2007, 98, 206805
12. Park, C.-H.; Yang, L.; Son, Y.-W.; Cohen, M. L.; Louie, S. G. Anisotropic Behaviours of Massless Dirac Fermions in Graphene under Periodic Potentials Nat. Phys. 2008, 4, 213-217
13. Martínez, R. V.; Losilla, N. S.; Martinez, J.; Huttel, Y.; Garcia, R. Patterning Polymeric Structures with 2 nm Resolution at 3 nm Half Pitch in Ambient Conditions Nano Lett. 2007, 7, 1846-1850 (Pubitemid 47197556)
14. Giesbers, A. J. M.; Zeitler, U.; Neubeck, S.; Freitag, F.; Novoselov, K. S.; Maan, J. C. Nanolithography and Manipulation of Graphene Using an Atomic Force Microscope Solid State Commun. 2008, 147, 366-369
15. Weng, L.; Zhang, L.; Chen, L.; Chen, Y. P.; Rokhinson, L. P. Atomic Force Microscope Local Oxidation Nanolithography of Graphene Appl. Phys. Lett. 2008, 93, 093107
16. Masubuchi, S.; Ono, M.; Yoshida, K.; Hirakawa, K.; Machida, T. Fabrication of Graphene Nanoribbon by Local Anodic Oxidation Lithography Using Atomic Force Microscope Appl. Phys. Lett. 2009, 94, 082107
17. Puddy, R. K.; Scard, P. H.; Tyndall, D.; Connolly, M. R.; Smith, C. G.; Jones, G. A. C.; Lombardo, A.; Ferrari, A. C.; Buitelaar, M. R. Atomic Force Microscope Nanolithography of Graphene: Cuts, Pseudocuts, and Tip Current Measurements Appl. Phys. Lett. 2011, 98, 133120
18. Neubeck, S.; Ponomarenko, L. A.; Freitag, F.; Giesbers, A. J. M.; Zeitler, U.; Morozov, S. V.; Blake, P.; Geim, A. K.; Novoselov, K. S. From One Electron to One Hole: Quasiparticle Counting in Graphene Quantum Dots Determined by Electrochemical and Plasma Etching Small 2010, 6 (14) 1469-1473
19. Lu, G.; Zhou, X.; Li, Hai.; Yin, Z.; Li, B.; Huang, L.; Boey, F.; Zhang, H. Nanolithography of Single-Layer Graphene Oxide Films by Atomic Force Microscopy Langmuir 2010, 26, 6164-6166
20. Mativetsky, J. M.; Treossi, E.; Orgiu, E.; Melucci, M.; Veronese, G. P.; Samorí, P.; Palermo, V. Local Current Mapping and Patterning of Reduced Graphene Oxide J. Am. Chem. Soc. 2010, 132, 14130-14136
21. Wei, Z. Q.; Wang, D. B.; Kim, S.; Kim, S. Y.; Hu, Y. K.; Yakes, M. K.; Laracuente, A. R.; Dai, Z. T.; Marder, S. R.; Berger, C. et al. Nanoscale Tunable Reduction of Graphene Oxide for Graphene Electronics Science 2010, 328, 1373-1376
22. Ao, Z. M.; Peeters, F. M. Electric Field: a Catalyst for Hydrogenation of Graphene Appl. Phys. Lett. 2010, 96, 253106
23. Červenka, J.; Kalousek, M.; Bartošík, M.; Škoda, D.; Tomanec, O.; Šikola, T. Fabrication of Nanostructures on Si(100) and GaAs(100) by Local Anodic Oxidation Appl. Surf. Sci. 2006, 253, 2373-2378 (Pubitemid 44820507)
24. Kudin, K. N.; Ozbas, B.; Schniepp, H. C.; Prud'homme, R. K.; Aksay, I. A.; Car, R. Raman Spectra of Graphite Oxide and Functionalized Graphene Sheets Nano Lett. 2008, 8, 36-41 (Pubitemid 351177772)
25. Yoon, D.; Moon, H.; Cheong, H.; Choi, J. S.; Choi, J. A.; Park, B. H. Variations in the Raman Spectrum as a Function of the Number of Graphene Layers J. Korean Phys. Soc. 2009, 55, 1299-1303
26. Ferrari, A. C.; Robertson, J. Interpretation of Raman Spectra of Disordered and Amorphous Carbon Phys. Rev. B 2000, 61, 14095
27. Ferrari, A. C.; Meyer, J. C.; Scardaci, V.; Casiraghi, C.; Lazzeri, M.; Mauri, F.; Piscanec, P.; Jiang, D.; Novoselov, K. S.; Roth, S.; Geim, A. K. Raman Spectrum of Graphene and Graphene Layers Phys. Rev. Lett. 2006, 97, 187401
28. Yang, D.; Velamakanni, A.; Bozoklu, G.; Park, S.; Piner, R. D.; Stankovich, S.; Jung, I.; Field, D. A.; Ventrice, J. C. A.; Ruoff, R. S. Chemical Analysis of Graphene Oxide Films after Heat and Chemical Treatments by X-ray Photoelectron and Micro-Raman Spectroscopy Carbon 2009, 47, 145-152
29. Mattevi, C.; Eda, G.; Agnoli, S.; Miller, S.; Mkhoyan, K. A.; Celik, O.; Mastrogiovanni, D.; Granozzi, G.; Garfunkel, E.; Chhowalla, M. Evolution of Electrical, Chemical, and Structural Properties of Transparent and Conducting Chemically Derived Graphene Thin Films Adv. Funct. Mater. 2009, 19, 2577-2583
30. Johannes, M. S.; Cole, D. G.; Clark, R. L. Velocity Controlled Anodization Nanolithography with an Atomic Force Microscope Using Faradaic Current Feedback Appl. Phys. Lett. 2007, 90, 103106
31. Avouris, P.; Hertel, T.; Martel, R. Atomic Force Microscope Tip-Induced Local Oxidation of Silicon: Kinetics, Mechanism, and Nanofabrication Appl. Phys. Lett. 1997, 71, 285
32. Liu, Y.; Szlufarska, I. Effect of Trace Moisture on Friction Appl. Phys. Lett. 2010, 96, 101902
33. Neubeck, S.; Freitag, F.; Yang, R.; Novoselov, K. S. Scanning Probe Lithography on Graphene Phys. Status Solidi B 2010, 247, 2904-2908
34. Minne, S. C.; Adams, J. D.; Yaralioglu, G.; Manalis, S. R.; Atalar, A.; Quate, C. F. Centimeter Scale Atomic Force Microscope Imaging and Lithography Appl. Phys. Lett. 1998, 73, 1742