Atomic force microscope nanolithography: dip-pen, nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography

Journal of Physics Condensed Matter

Volumn 21, Issue 48, 2009, Pages

  Rosa, Luis G ^a,b   Liang, Jian ^c  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^c Och Spine at New York Presbyterian Hospitals   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM NANOLITHOGRAPHY; AFM PROBE; AFM TIP; ATOMIC FORCE MICROSCOPES; DIP-PEN NANOLITHOGRAPHY; FABRICATION PROCESS; MECHANICAL FORCE; NANOGRAFTING; NANOSHAVING; STATE OF RESEARCH; STATE OF THE ART; TAPPING MODES;

BOND STRENGTH (CHEMICAL); ELECTRON ENERGY LEVELS; NANOLITHOGRAPHY; SELF ASSEMBLED MONOLAYERS;

ATOMIC FORCE MICROSCOPY;

EID: 77956020940     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/48/483001     Document Type: Review

References (133)

1. Binnig G, Quate C F and Gerber C 1986 Phys. Rev. Lett. 56 930-3
2. Samori P 2004 Scanning probe microscopies beyond imaging J. Mater. Chem. 14 1353-66
3. Carpick R W and Salmeron M 1997 Chem. Rev. 97 1163
4. Butt H J 1991 Biophys. J. 60 777
5. Nonnenmacher M, O'Boyle M P and Wickramasinghe H K 1991 Appl. Phys. Lett. 58 2921
6. Rugar D, Mamin H J, Guethner P, Lambert S E, Stern J E, McFadyen I and Yogi T 1990 J. Appl. Phys. 68 1169
7. Majumdar A 1999 Annu. Rev. Mater. Sci. 29 505
8. Xu S and Liu G 1997 Langmuir 13 127-9
9. Piner R D, Zhu J, Xu F, Hong S and Mirkin C A 1999 Science 283 661-3
10. Zhou D, Bruckbauer A, Ying L, Abell C and Klenerman D 2003 Nano Lett. 3 1517-20
11. Rezek B, Ukraintsev E, Michalíková L, KromkaA, Zemek J and Kalbacova M 2009 Diamond Relat. Mater. 18 918-22
12. Liu G-Y and Amro N A 2002 Proc. Natl Acad. Sci. 99 5165-70
13. Wilson D L, Martin R, Hong S, Cronin-Golomb M, Mirkin C A and Kaplan D L 2001 Proc. Natl Acad. Sci. 98 13660-4
14. Rosi N L and Mirkin C A 2005 Chem. Rev. 105 1547-62
15. Koumoto K, Saito N, Gao Y, Masuda Y and Zhu P 2008 Bull. Chem. Soc. Japan 81 1337-76
16. Ginger D S, Zhang H and Mirkin C A 2004 Angew. Chem. Int. Edn 43 30-45
17. Gates B D, Xu Q, Love J C, Wolfe D B and Whitesides G M 2004 Annu. Rev. Mater. Res. 34 339-72
18. Hong S and Mirkin C A 2000 Science 288 1808-11
19. Gu Z, Huang S and Chen Y 2009 Angew. Chem. Int. 48 952-5
20. Geissler M and Xia Y 2004 Adv. Mater. 16 1249-69
21. Hamley I W 2003 Angew. Chem. Int. 42 1692-712
22. Hon K K B, Li L and Hutchings I M 2008 CIRP Ann.-Manuf. Technol. 57 601-20
23. Krämer S, Fuierer R R and Gorman C B 2003 Chem. Rev. 103 4367-418
24. Wang Y, Mirkin C A and Park S J 2009 ACS Nano 3 1049-56
25. Leggett G J 2005 Analyst 130 259-64
26. Staii C, Wood D W and Scoles G 2008 Nano Lett. 8 2503-9
27. Staii C, Wood D W and Scoles G 2008 J. Am. Chem. Soc. 130 640-6
28. Garno J C, Yang Y, Amro N A, Cruchon-Dupeyrat S, Chen S and Liu G-Y 2003 Nano Lett. 3 389
29. Liu J-F, Cruchon-Dupeyrat S, Garno J C, Frommer J and Liu G-Y 2002 Nano Lett. 2 937
30. Wang X, Zhou D, Rayment T and Abell C 2003 Chem. Commun. 4 474
31. Garno J C, Amro N A, Wadu-Mesthrige K and Liu G-Y 2002 Langmuir 18 8186
32. Jang C-H, Stevens B D, Carlier P R, Calter M A and Ducker W A 2002 J. Am. Chem. Soc. 124 12114
33. Zhou D, Sinniah K, Abell C and Rayment T 2002 Langmuir 18 8278
34. Zhou D, Sinniah K, Abell C and Rayment T 2003 Angew. Chem. Int. Edn 42 4934
35. Liu M and Liu G-Y 2005 Langmuir 21 1972
36. Case M A, McLendon G L, Hu Y, Vanderlick T K and Scoles G 2003 Nano Lett. 3 425
37. Hu Y, Das A, Hecht M H and Scoles G 2005 Langmuir 21 9103
38. Jourdan J S, Cruchon-Dupeyrat S J, Huan Y, Kuo P K and Liu G-Y 1999 Langmuir 15 6495
39. Houston J E, Doelling C M, Vanderlick T K, Hu Y, Scoles G, Wenzl I and Lee T R 2005 Langmuir 21 3926
40. Ryu S and Schatz G C 2006 J. Am. Chem. Soc. 128 11563-73
41. Giam L R, Wang Y and Mirkin C A 2009 J. Phys. Chem. A 113 3779-82
42. Yu J-J, Tan Y H, Li X, Kuo P-K and Liu G-Y 2006 J. Am. Chem. Soc. 128 11574
43. Xu S, Laibinis P E and Liu G-Y 1998 J. Am. Chem. Soc. 120 9356
44. Rosa L G, Jiang J, Lima OV, Xiao J, Utreras E, Dowben P A and Tan L 2009 Mater. Lett. 63 961-4
45. Smith R K, Lewis P A andWeiss P S 2004 Prog. Surf. Sci. 75 1-68
46. Onclin S, Ravoo B J and Reinhoudt D N 2005 Angew. Chem. Int. Edn 44 6282-304
47. Lee M V et al 2007 Chem. Mater. 19 5052-4
48. Headrick J E, Armstrong M, Cratty J, Hammond S, Sheriff B A and Berrie C L 2005 Langmuir 21 4117-22
49. Lim J-H, Ginger D S, Lee K-B, Heo J, Nam J-M and Mirkin C A 2003 Angew. Chem. Int. Edn 42 2309-12
50. Luo M F, Su Y H, Hu G R, Nien C-H, Hsueh Y W and Chen P 2009 Thin Solid Films 517 1765-9
51. Jiang J Y, Lima O V, Pei Y, Zeng X C, Tan L and Forsythe E 2009 J. Am. Chem. Soc. 131 900
52. Ruckenstein E and Li Z F 2005 Adv. Colloid Interface Sci. 113 43-63
53. Laibinis P E, Whitesides G M, Allara D L, Tao Y T, Parikh A N and Nuzzo R G 1991 J. Am. Chem. Soc. 113 7152-67
54. Basnar B and Willner I 2009 Small 5 28-44
55. Gooding J J, Mearns F, YangW and Liu J 2003 Electroanalysis 15 81-96
56. Liang J, Sun Q, Selloni A and Scoles G 2006 J. Phys. Chem. B 110 24797-801
57. SenaratneW, Andruzzi L and Ober C K 2005 Biomacromolecules 6 2427-48
58. Reed M A, Zhou C, Muller C J, Burgin T P and Tour J M 1997 Science 278 252
59. Sakotsubo Y, Ohgi T, Fujita D and Ootuka Y 2005 Physica E 29 601
60. Nuzzo R G, Dubois L H and Allara D L 1990 J. Am. Chem. Soc. 112 558
61. Poirier G E and Pylant E D 1996 Science 272 1145
62. Meshulam G, Rosenberg N, Caster A, Burstein L, Gozin M and Richter S 2005 Small 1 848
63. Bethell D, Brust M, Schiffrin D J and Kiely C 1996 J. Electroanal. Chem. 409 137
64. Harrell L E, Bigioni T P, Cullen W G, Whetten R L and First P N 1999 J. Vac. Sci. Technol. B 17 2411
65. Ohgi T, Sheng H-Y, Dong Z-C, Nejoh H and Fujita D 2001 Appl. Phys. Lett. 79 2453
66. Aslam M, Mulla I S and Vijayamohanan K 2001 Langmuir 17 7487
67. Bandyopadhyay K and Vijayamohanan K 1998 Langmuir 14 6924
68. Liu F-K, Hsu Y-T and Wu C-H 2005 J. Chromatogr. A 1083 205
69. Vandamme N, Snauwaert J, Janssens E, Vandeweert E, Lievens P and Van Haesendonck C 2004 Surf. Sci. 558 57
70. Noda H, Tai Y, Shaporenko A, Grunze M and Zharnikov M 2005 J. Phys. Chem. B 109 22371
71. Qu D and Uosaki K 2006 J. Phys. Chem. B 110 17570
72. Chen S 2000 J. Phys. Chem. B 104 663
73. de Boer B, Frank M M, Chabal Y J, Jiang W, Garfunkel E and Bao Z 2004 Langmuir 20 1539
74. Lioubashevski O, Chegel V I, Patolsky F, Katz E and Willner I 2004 J. Am. Chem. Soc. 126 7133
75. Xiao Y, Patolsky F, Katz E, Hainfeld J F and Willner I 2003 Science 299 1877
76. Erickson E S, Livanec P W, Frisz J F and Dunn R C 2009 Langmuir 25 5098-102
77. Pignataro B 2009 J. Mater. Chem. 19 3338
78. Zhang Y, Tong Y, Abe M, Uosaki K, Osawa M, Sasaki Y and Ye S 2009 J. Mater. Chem. 19 261
79. Mendes P M, Yeung C L and Preece J A 2007 Nanoscale Res. Lett. 2 373
80. Sader J E, Larson I, Mulvaney P andWhite L R 1995 Rev. Sci. Instrum. 66 3789
81. Sader J E 1995 Rev. Sci. Instrum. 66 4583
82. Sader J E, Chon J W M and Mulvaney P 1999 Rev. Sci. Instrum. 70 3967
83. San Paulo A and García R 2001 Phys. Rev. B 64 193411
84. García R and Pérez R 2002 Surf. Sci. Rep. 47 197
85. Lee M H and Jhe W H 2006 Phys. Rev. Lett. 97 036104
86. Kowalewski T and Legleiter J 2006 J. Appl. Phys. 99 064903
87. Kokavecz J, Horváth Z L and Mechler A 2004 Appl. Phys. Lett. 85 3232
88. Stark R W, Schitter G and Stemmer A 2003 Phys. Rev. B 68 085401
89. Baba A, Sato F, Fukuda N, Ushijima H and Yase K 2009 Nanotechnology 20 085301
90. Li B, Goh C F, Zhou X, Lu G, Tantang H, Chen Y, Xue C, Boey F Y C and Zhang H 2008 Adv. Mater. 20 4873-8
91. Martínez-Otero A, Hernando J, Ruiz-Molina D and Maspoch D 2008 Small 4 2131-5
92. Zheng Z, Jang J-W, Zheng G and Mirkin C A 2008 Angew. Chem. Int. Edn 47 9951-4
93. Zhang M, Bullen D, Chung S-W, Hong S, Ryu K S, Fan Z, Mirkin C A and Liu C 2002 Nanotechnology 13 212-7
94. Li Y, Maynor B W and Liu J 2001 J. Am. Chem. Soc. 123 2105-6
95. Seo K and Borguet E 2006 Langmuir 22 1388-91
96. Brower T L, Garno J C, Ulman A, Liu G-Y, Yan C, Gölzhäuser A and Grunze M 2002 Langmuir 18 6207-16
97. Hurley P T, Ribbe A E and Buriak J M 2003 J. Am. Chem. Soc. 125 11334-9
98. Vettiger P et al 2002 IEEE Trans. Nanotechnol. 1 39-55
99. Eleftheriou E et al 2003 IEEE Trans. Magn. 39 938-45
100. Dürig U et al 2000 Tribol. Lett. 9 25-32
101. Vettiger P, Despont M, Drechsler U, Dürig U, Häberle W, Lutwyche M I, Rothuizen H E, Stutz R, Widmer R and Binnig G K 2000 IBM J. Res. Dev. 44 323-40
102. Mateiu R, Kühle A, Marie R and Boisen A 2005 Ultramicroscopy 105 233-7
103. Leung T Y B, GerstenbergM C, Lavrich D J, Scoles G, Schreiber F and Poirier G E 2000 Langmuir 16 549
104. Esplandiu M J, Carot M L, Cometto F P, Macagno V A and Patrito E M 2006 Surf. Sci. 600 155
105. Pontes R B, Novaes F D, Fazzio A and da Silva A J R 2006 J. Am. Chem. Soc. 128 8996
106. Bauschlicher C W and Ricca A 2003 Chem. Phys. Lett. 367 90
107. JiangW, Zhitenev N, Bao Z, Meng H, Abusch-Magder D, Tennant D and Garfunkel E 2005 Langmuir 21 8751
108. Tai Y, Shaporenko A, Rong H T, Buck M, EckW, Grunze M and Zharnikov M 2004 J. Phys. Chem. B 108 16806
109. Joo S W, Han S W and Kim K 2001 J. Colloid Interface Sci. 240 391
110. Tour J M, Jones L, Pearson D L, Lamba J J S, Burgin T P, Whitesides G M, Allara D L, Parikh A N and Atre S V 1995 J. Am. Chem. Soc. 117 9529
111. Kasibhatla B S T, Labonte A P, Zahid F, Reifenberger R G, Datta S and Kubiak C P 2003 J. Phys. Chem. B 107 12378
112. Niklewski A, Azzam W, Strunskus T, Fischer R A and Wöll C 2004 Langmuir 20 8620
113. Ulman A 1996 Chem. Rev. 96 1533
114. Love J C, Estroff L A, Kriebel J K, Nuzzo R G and Whitesides G M 2005 Chem. Rev. 105 1103
115. Wang W, Lee T and Reed M A 2005 Rep. Prog. Phys. 68 523
116. Brust M, Blass P M and Bard A J 1997 Langmuir 13 5602
117. Brower T L, Cook M and Ulman A 2003 J. Phys. Chem. B 107 11721
118. Liu G-Y, Xu S and Qian Y 2000 Acc. Chem. Res. 33 457-66
119. Kaholek M, LeeW-K, Ahn S-J, Ma H, Caster K C, LaMattina B and Zauscher S 2004 Chem. Mater. 16 3688-96
120. Chwang A B, Granstrom E L and Frisbie C D 2000 Adv. Mater. 12 285-8
121. Shi J, Chen J and Cremer P S 2008 J. Am. Chem. Soc. 130 2718-9
122. Kaholek M, LeeW-K, LaMattina B, Caster K C and Zauscher S 2004 Nano Lett. 4 373-6
123. Liang J, Rosa L G and Scoles G 2007 J. Phys. Chem. C 111 17275-84
124. Greene M E, Kinser C R, Kramer D E, Pingree L S C and Hersam M C 2004 Microsc. Res. Tech. 64 415
125. Garcia R, Martinez R V and Martinez J 2006 J. Chem. Soc. Rev. 35 29
126. Amro N A, Xu S and Liu G-Y 2000 Langmuir 16 3006
127. Jaschke M and Butt H-J 1995 Langmuir 11 1061
128. Senkevich J J, Mitchell C J, Yang G-R and Lu T-M 2002 Langmuir 18 1587
129. Sanderson R T 1976 Chemical Bonds and Bond Energy 2nd edn (New York: Academic) ISBN-10:0126180601
130. Agarwal G, Sowards L A, Naik R R and Stone M O 2003 J. Am. Chem. Soc. 125 580-3
131. Liang J and Scoles G 2007 Langmuir 23 6142-7
132. Hansen L T, Kühle A, Sorensen A H, Bohr J and Lindelof P E 1998 Nanotechnology 9 337
133. García R, Calleja M and Rohrer H 1999 J. Appl. Phys. 86 1898