Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope

Review of Scientific Instruments

Volumn 72, Issue 1 I, 2001, Pages 136-141

  Heyde, M ^a   Rademann, K ^a   Cappella, B ^b   Geuss, M ^b   Sturm, H ^b   Spangenberg, T ^a   Niehus, H ^a  

^a HUMBOLDT UNIVERSITY   (Germany)

^b Fed Inst for Materials and Testing   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001182725     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1326053     Document Type: Article

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