Sputter crater formation in the case of microsecond pulsed glow discharge in a Grimm-type source. Comparison of direct current and radio frequency modes

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 76, Issue , 2012, Pages 181-189

  Efimova, Varvara ^a   Hoffmann, Volker ^a   Eckert, Jürgen ^a,b  

^a IFW DRESDEN   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Crater shape; Depth profiling; Glow discharge; Pulsed discharge; Sputtering

Indexed keywords

CONTINUOUS MODE; CRATER FORMATION; CRATER SHAPE; CRUCIAL PARAMETERS; DEPTH PROFILE; DEPTH RESOLUTION; DIRECT CURRENT; DUTY CYCLES; PULSE LENGTH; PULSED DC; PULSED DISCHARGE; PULSED GLOW DISCHARGE; PULSED MODE; PULSED VOLTAGES; RADIO FREQUENCIES; RF MODE; SPUTTERING EFFECTS; SPUTTERING RATE;

DEPTH PROFILING; GLOW DISCHARGES; SPUTTERING;

OPTIMIZATION;

EID: 84867400436     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2012.06.040     Document Type: Article

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