SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 42, Issue 4, 2010, Pages 328-333

Surface topography effects on glow discharge depth profiling analysis

(7) Trigoulet, N a Hashimoto, T a Molchan, I S a Skeldon, P a Thompson, G E a Tempez, A b Chapon, P b

a UNIVERSITY OF MANCHESTER (United Kingdom)

b HORIBA LTD (Japan)

Author keywords

Anodic oxide; Depth resolution; GD OES; Roughness

Indexed keywords

ANODIC ALUMINIUM OXIDE; ANODIC FILMS; ANODIC OXIDES; DEPTH RESOLUTION; DEPTH-PROFILING ANALYSIS; ELEMENTAL DEPTH PROFILING; GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY; NONCONDUCTIVE SUBSTRATES; ROUGH SURFACES; SPUTTERING PROCESS; SUBSTRATE TEXTURE; TRANSPORT PHENOMENA;

ALUMINUM; CONDUCTIVE FILMS; DEPTH PROFILING; EMISSION SPECTROSCOPY; GLOW DISCHARGES; ION BOMBARDMENT; OPTICAL EMISSION SPECTROSCOPY; OXIDE FILMS; PHOTODEGRADATION; SUBSTRATES; THICK FILMS; TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 77950839843 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.3165 Document Type: Conference Paper

Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.