Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow-discharge optical emission spectroscopy

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 757-760

  Schwaller, P ^a   Aeberhard, M ^a   Nelis, T ^a   Fischer, A ^a   Thapliyal, R ^a   Michler, J ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Depth profiling; Glow discharge optical emission spectroscopy; Lead zirconium titanate

Indexed keywords

COMPOSITION; LEAD; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; THIN FILMS; TITANIUM; ZIRCONIUM;

DEPTH PROFILING; GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY; GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD-OES); LEAD-ZIRCONIUM-TITANATE;

INTERMETALLICS;

EID: 33646540460     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2264     Document Type: Conference Paper

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