Molecular dynamics simulations of low-energy (25-200 eV) argon ion interactions with silicon surfaces: Sputter yields and product formation pathways

Journal of Applied Physics

Volumn 83, Issue 8, 1998, Pages 4055-4063

  Kubota, Nawoyuki A ^a   Economou, Demetre J ^a   Plimpton, Steven J ^b  

^a University of Houston   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001006866     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367225     Document Type: Article

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