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Volumn 385, Issue 3, 2006, Pages 568-585

The concept of constant emission yield in GDOES

Author keywords

Compositional depth profiling; Emission yield; Glow discharge optical emission spectroscopy

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; GLOW DISCHARGES; MATHEMATICAL MODELS; PLASMAS; PRESSURE EFFECTS;

EID: 33646859235     PISSN: 16182642     EISSN: 16182650     Source Type: Journal    
DOI: 10.1007/s00216-006-0412-7     Document Type: Review
Times cited : (39)

References (65)
  • 8
    • 33646020395 scopus 로고    scopus 로고
    • GDOES and MS as tool for surface and interface analysis
    • in press
    • Nelis Th, Pallosi J (2006) GDOES and MS as tool for surface and interface analysis. Appl Spectrosc Rev (in press)
    • (2006) Appl Spectrosc Rev
    • Nelis, Th.1    Pallosi, J.2
  • 9
    • 0032166405 scopus 로고    scopus 로고
    • Modelling of argon direct current glow discharges and comparison with experiment: How good is the agreement?
    • Bogearts A, Gijbels R (1998) Modelling of argon direct current glow discharges and comparison with experiment: how good is the agreement? J Anal Atom Spectrom 13:945-953
    • (1998) J Anal Atom Spectrom , vol.13 , pp. 945-953
    • Bogearts, A.1    Gijbels, R.2
  • 10
    • 0032027713 scopus 로고    scopus 로고
    • Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: A mathematical simulation
    • Bogaerts A, Gijbels R (1998) Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: a mathematical simulation. Spectrochim Acta B 53:437-462
    • (1998) Spectrochim Acta B , vol.53 , pp. 437-462
    • Bogaerts, A.1    Gijbels, R.2
  • 11
    • 0037591599 scopus 로고    scopus 로고
    • Laser-scattering instrument for fundamental studies on a glow discharge
    • Gamez G, Huang M, Lehn SA, Hiiftje GM (2003) Laser-scattering instrument for fundamental studies on a glow discharge. J Anal Atom Spectrom 18:680-684
    • (2003) J Anal Atom Spectrom , vol.18 , pp. 680-684
    • Gamez, G.1    Huang, M.2    Lehn, S.A.3    Hiiftje, G.M.4
  • 13
    • 0033204281 scopus 로고    scopus 로고
    • Monte Carlo model for the argon ions and fast argon atoms in a radio-frquency discharge
    • Bogaerts A, Gijbels R (1999) Monte Carlo model for the argon ions and fast argon atoms in a radio-frquency discharge. IEEE T Plasma Sci 27(5):1406-1415
    • (1999) IEEE T Plasma Sci , vol.27 , Issue.5 , pp. 1406-1415
    • Bogaerts, A.1    Gijbels, R.2
  • 14
    • 0041438417 scopus 로고    scopus 로고
    • Electrical characterization of radiofrequency glow discharge used for optical emission spectroscopy
    • Belenguer Ph, Guillot Ph, Therese L (2003) Electrical characterization of radiofrequency glow discharge used for optical emission spectroscopy. Surf Interf Anal 35:604-610
    • (2003) Surf Interf Anal , vol.35 , pp. 604-610
    • Belenguer, Ph.1    Guillot, P.2    Therese, L.3
  • 16
    • 33646891761 scopus 로고    scopus 로고
    • Payling R, Jones DJ, Bengtson A (eds) Wiley, Chichester, UK, Chap. 8.6
    • Payling R (1997) In: Payling R, Jones DJ, Bengtson A (eds) Glow discharge optical emission spectroscopy. Wiley, Chichester, UK, Chap. 8.6
    • (1997) Glow Discharge Optical Emission Spectroscopy
    • Payling, R.1
  • 17
    • 0032182308 scopus 로고    scopus 로고
    • Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge
    • Bogaerts A, Gijbels R, Carman RJ (1998) Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge. Spectrochim Acta B 53: 1679-1703
    • (1998) Spectrochim Acta B , vol.53 , pp. 1679-1703
    • Bogaerts, A.1    Gijbels, R.2    Carman, R.J.3
  • 20
    • 33646873308 scopus 로고
    • Rigaku Inc. Japanese patent. No.JP6043100
    • Nobory Y (1994) Rigaku Inc. Japanese patent. No.JP6043100
    • (1994)
    • Nobory, Y.1
  • 21
    • 0032664340 scopus 로고    scopus 로고
    • Interference phenomena at transparent layers in glow discharge optical emission spectrometry
    • Hoffmann V, Kurt R, Kämmer K, Thielsch R, Wirth Th, Beck U (1999) Interference phenomena at transparent layers in glow discharge optical emission spectrometry. Appl Spectrosc 53 (8):987-990
    • (1999) Appl Spectrosc , vol.53 , Issue.8 , pp. 987-990
    • Hoffmann, V.1    Kurt, R.2    Kämmer, K.3    Thielsch, R.4    Wirth, Th.5    Beck, U.6
  • 22
    • 0035271491 scopus 로고    scopus 로고
    • Effect of optical interferences on BPSG profiles obtained with a GDOES
    • Kimura S, Mitsui Y (2001) Effect of optical interferences on BPSG profiles obtained with a GDOES, Appl Spectrosc 55 (3):292-297
    • (2001) Appl Spectrosc , vol.55 , Issue.3 , pp. 292-297
    • Kimura, S.1    Mitsui, Y.2
  • 24
    • 0019574916 scopus 로고
    • Surface analysis by glow discharge
    • Berneron R, Charbonier JC (1981) Surface analysis by glow discharge. Surf Interf Anal 3(3):134-141
    • (1981) Surf Interf Anal , vol.3 , Issue.3 , pp. 134-141
    • Berneron, R.1    Charbonier, J.C.2
  • 27
    • 0022112492 scopus 로고
    • Study of emission and sputtering yields in some alloys and oxide by glow discharge optical spectrometry: Quantification of analysis
    • Pons-Corbeau J (1985) Study of emission and sputtering yields in some alloys and oxide by glow discharge optical spectrometry: quantification of analysis. Surf Interf Anal 7(4):160-176
    • (1985) Surf Interf Anal , vol.7 , Issue.4 , pp. 160-176
    • Pons-Corbeau, J.1
  • 35
    • 0027832037 scopus 로고
    • Quantitative analysis with dc and rf glow discharge spectrometry
    • Payling R, Jones DG, Gower SA (1993) Quantitative analysis with dc and rf glow discharge spectrometry. Surf Interf Anal 20:939-966
    • (1993) Surf Interf Anal , vol.20 , pp. 939-966
    • Payling, R.1    Jones, D.G.2    Gower, S.A.3
  • 36
    • 0027642749 scopus 로고
    • Fundamental parameters in quantitative depth profiling and bulk analysis with glow discharge spectrometry
    • Payling R, Jones DO (1993) Fundamental parameters in quantitative depth profiling and bulk analysis with glow discharge spectrometry. Surf Interf Anal 20:787-793
    • (1993) Surf Interf Anal , vol.20 , pp. 787-793
    • Payling, R.1    Jones, D.O.2
  • 38
    • 33646894968 scopus 로고    scopus 로고
    • Engineering thesis. Conservatoire National des Arts et Metiers, Paris
    • Vegiotti JP (1997) Engineering thesis. Conservatoire National des Arts et Metiers, Paris, p 49
    • (1997) , pp. 49
    • Vegiotti, J.P.1
  • 39
    • 0029197255 scopus 로고
    • Search of the ultimate experiment for QDP in GDOES part I
    • Payling R, Jones DG, Gower SA (1995) In search of the ultimate experiment for QDP in GDOES part I. Surf Interf Anal 23:1-11
    • (1995) Surf Interf Anal , vol.23 , pp. 1-11
    • Payling, R.1    Jones, D.G.2    Gower, S.A.3
  • 41
    • 0029196722 scopus 로고
    • Search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part II: Generalized method
    • Payling R (1995) In search of the ultimate experiment for quantitative depth profile analysis in glow discharge optical emission spectrometry. Part II: Generalized method. Surf Interf Anal 23:12-21
    • (1995) Surf Interf Anal , vol.23 , pp. 12-21
    • Payling, R.1
  • 45
    • 0035128091 scopus 로고    scopus 로고
    • Improved quantitative analysis of hard coatings by radiofrequency glow discharge optical emissio spectrometry (rf-GDOES)
    • Payling R, Aeberhard M, Delfoss D (2001) Improved quantitative analysis of hard coatings by radiofrequency glow discharge optical emissio spectrometry (rf-GDOES). J Anal Atom Spectrom 16:50-55
    • (2001) J Anal Atom Spectrom , vol.16 , pp. 50-55
    • Payling, R.1    Aeberhard, M.2    Delfoss, D.3
  • 46
    • 0036610996 scopus 로고    scopus 로고
    • Quantitative analysis of conductive coatings by radiofrequency powered glow discharge optical emission spectrometry: Hydrogen, d.c. bias voltage and density corrections
    • Payling R, Michler J, Aeberhard M (2002) Quantitative analysis of conductive coatings by radiofrequency powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections. Surf Interf Anal 33: 372-477
    • (2002) Surf Interf Anal , vol.33 , pp. 372-477
    • Payling, R.1    Michler, J.2    Aeberhard, M.3
  • 49
    • 33646894479 scopus 로고    scopus 로고
    • Thesis. Univ. Toulouse III, France
    • Therèse L (2005) Thesis. Univ. Toulouse III, France, p 81
    • (2005) , pp. 81
    • Therèse, L.1
  • 51
    • 5244260068 scopus 로고
    • Correcting for background and inter element effects in glow discharge optical emission spectrometry
    • Payling R, Brown NV, Gower SA (1994) Correcting for background and inter element effects in glow discharge optical emission spectrometry. J Anal Atom Spectrom 9:363
    • (1994) J Anal Atom Spectrom , vol.9 , pp. 363
    • Payling, R.1    Brown, N.V.2    Gower, S.A.3
  • 52
    • 0141921927 scopus 로고    scopus 로고
    • CDP organic coating - Molecular bands
    • Bengtson A (2003) CDP organic coating - molecular bands. J Anal Atom Spectrom 18:1066-1068
    • (2003) J Anal Atom Spectrom , vol.18 , pp. 1066-1068
    • Bengtson, A.1
  • 53
    • 0037325331 scopus 로고    scopus 로고
    • Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry
    • Fernandez B, Bordel N, Pereiroa R, Sanz-Medel A (2003) Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry. J Anal Atom Spectrom 18:151-156
    • (2003) J Anal Atom Spectrom , vol.18 , pp. 151-156
    • Fernandez, B.1    Bordel, N.2    Pereiroa, R.3    Sanz-Medel, A.4
  • 54
    • 0031069715 scopus 로고    scopus 로고
    • Three-dimensional density profiles of argon metastable atoms in a direct current glow discharge: Experimental study and comparison with calculations
    • Boegaerts A, Guernard RD, Smith BW, Wineforder JD, Harrison WW, Gijbels R (1997) Three-dimensional density profiles of argon metastable atoms in a direct current glow discharge: experimental study and comparison with calculations. Spectrochim Acta B 53:219-229
    • (1997) Spectrochim Acta B , vol.53 , pp. 219-229
    • Boegaerts, A.1    Guernard, R.D.2    Smith, B.W.3    Wineforder, J.D.4    Harrison, W.W.5    Gijbels, R.6
  • 55
    • 0032475549 scopus 로고    scopus 로고
    • Modeling of glow discharge optical emission spectrometry: Calculation of the argon atomic optical emission spectrum
    • Bogaerts A, Gijbels R, Vlcek J (1998) Modeling of glow discharge optical emission spectrometry: calculation of the argon atomic optical emission spectrum. Spectrochim Acta B 53:1517-1526
    • (1998) Spectrochim Acta B , vol.53 , pp. 1517-1526
    • Bogaerts, A.1    Gijbels, R.2    Vlcek, J.3
  • 56
    • 0032138769 scopus 로고    scopus 로고
    • Argon and copper optical emission spectra in a Grimm glow discharge source: Mathematical simulations and comparison with experiment
    • Bogaerts A, Gijbels R (1998) Argon and copper optical emission spectra in a Grimm glow discharge source: mathematical simulations and comparison with experiment, J Anal Atom Spectrom 13:721-726
    • (1998) J Anal Atom Spectrom , vol.13 , pp. 721-726
    • Bogaerts, A.1    Gijbels, R.2
  • 57
    • 0000566234 scopus 로고
    • Developments in glow discharge emission spectrometry
    • Ferreira NP, Strauss JA, Human HGC (1983) Developments in glow discharge emission spectrometry. Spectrochim Acta 388:899-911
    • (1983) Spectrochim Acta , vol.388 , pp. 899-911
    • Ferreira, N.P.1    Strauss, J.A.2    Hgc, H.3
  • 60
    • 33646890694 scopus 로고    scopus 로고
    • Thesis. Univ. Toulouse III, France, (Fig. 5-54)
    • Therèse L (2005) Thesis. Univ. Toulouse III, France, p 140 (Fig. 5-54)
    • (2005) , pp. 140
    • Therèse, L.1
  • 61
    • 33646857281 scopus 로고    scopus 로고
    • Thesis. Univ. Toulouse III, France, (Fig. 5-71)
    • Therèse L (2005) Thesis. Univ. Toulouse III, France, p 149 (Fig. 5-71)
    • (2005) , pp. 149
    • Therèse, L.1
  • 62
    • 0027642749 scopus 로고
    • Fundamental parameters in quantitative depth profile analysis with glow discharge spectometry
    • Payling R, Jones DJ (1993) Fundamental parameters in quantitative depth profile analysis with glow discharge spectometry. Surf Interf Anal 20:787-793
    • (1993) Surf Interf Anal , vol.20 , pp. 787-793
    • Payling, R.1    Jones, D.J.2
  • 64
    • 0033877579 scopus 로고    scopus 로고
    • Behavior of the sputtered copper atoms, ions and excited species in a radio-frequency and direct current glow discharge
    • Bogaerts A, Gijbels R (2000) Behavior of the sputtered copper atoms, ions and excited species in a radio-frequency and direct current glow discharge. Spectrochim Acta B 55:279-297
    • (2000) Spectrochim Acta B , vol.55 , pp. 279-297
    • Bogaerts, A.1    Gijbels, R.2
  • 65
    • 33646890023 scopus 로고    scopus 로고
    • Thesis. Univ. Toulouse III, France
    • Therèse L (2005) Thesis. Univ. Toulouse III, France, p 74
    • (2005) , pp. 74
    • Therèse, L.1


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