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Volumn 21, Issue 2, 2006, Pages 112-125
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Characterisation of a pulsed rf-glow discharge in view of its use in OES
b
Atout and Progrès
*
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
CONDUCTIVE MATERIALS;
LIGHT EMISSION;
PLASMAS;
SPECTROSCOPIC ANALYSIS;
SPUTTERING;
GRIMM-TYPE GLOW DISCHARGE;
NON-RESONANT EMISSION;
OPTICAL EMISSION SPECTROSCOPY (OES);
RADIOFREQUENCY SPECTROSCOPY;
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EID: 33645502524
PISSN: 02679477
EISSN: 13645544
Source Type: Journal
DOI: 10.1039/b513279g Document Type: Article |
Times cited : (33)
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References (43)
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