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Volumn 26, Issue 4, 2011, Pages 784-791
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Electrical properties of the μs pulsed glow discharge in a Grimm-type source: Comparison of dc and rf modes
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Author keywords
[No Author keywords available]
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Indexed keywords
ANALYTICAL APPLICATIONS;
ANALYTICAL PERFORMANCE;
COMPARATIVE STUDIES;
DIRECT CURRENT;
DUTY CYCLES;
ELECTRICAL PROPERTY;
EMISSION YIELDS;
GAS TEMPERATURE;
OPTIMUM PARAMETERS;
PULSE DURATIONS;
PULSED DISCHARGE;
PULSED GLOW DISCHARGE;
RADIO FREQUENCY DISCHARGES;
RF MODE;
SPUTTERING RATE;
VOLTAGE SIGNALS;
CURRENT VOLTAGE CHARACTERISTICS;
GLOW DISCHARGES;
VOLTAGE MEASUREMENT;
ELECTRIC PROPERTIES;
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EID: 79953046970
PISSN: 02679477
EISSN: 13645544
Source Type: Journal
DOI: 10.1039/c0ja00176g Document Type: Conference Paper |
Times cited : (18)
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References (48)
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