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Volumn 26, Issue 4, 2011, Pages 784-791

Electrical properties of the μs pulsed glow discharge in a Grimm-type source: Comparison of dc and rf modes

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL APPLICATIONS; ANALYTICAL PERFORMANCE; COMPARATIVE STUDIES; DIRECT CURRENT; DUTY CYCLES; ELECTRICAL PROPERTY; EMISSION YIELDS; GAS TEMPERATURE; OPTIMUM PARAMETERS; PULSE DURATIONS; PULSED DISCHARGE; PULSED GLOW DISCHARGE; RADIO FREQUENCY DISCHARGES; RF MODE; SPUTTERING RATE; VOLTAGE SIGNALS;

EID: 79953046970     PISSN: 02679477     EISSN: 13645544     Source Type: Journal    
DOI: 10.1039/c0ja00176g     Document Type: Conference Paper
Times cited : (18)

References (48)
  • 21
    • 0003839414 scopus 로고
    • ed. J. E. Allen, Springer, Berlin, Heidelberg, New York
    • Y. P. Raizer, Gas Discharge Physics, ed., J. E. Allen,, Springer, Berlin, Heidelberg, New York, 1991
    • (1991) Gas Discharge Physics
    • Raizer, Y.P.1
  • 46
    • 0345296357 scopus 로고    scopus 로고
    • ed. R. Payling, D. Jones and A. Bengtson, JOHN WILEY & SONS, Chichester, New York, Weinheim, Brisbane, Singapore, Toronto
    • R. Payling, in Glow Discharge Optical Emission Spectrometry, ed., R. Payling,,, D. Jones, and, A. Bengtson,, JOHN WILEY & SONS, Chichester, New York, Weinheim, Brisbane, Singapore, Toronto, 1997, pp. 483-496
    • (1997) Glow Discharge Optical Emission Spectrometry , pp. 483-496
    • Payling, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.