Investigations on the ion energy distribution in an analytical radiofrequency glow discharge and its mass spectrometrical application

International Journal of Mass Spectrometry and Ion Processes

Volumn 171, Issue 1-3, 1997, Pages 183-189

  Jager R ^a   Becker, J S ^a   Dietze, H J ^a   Broekaert, J A C ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b TU DORTMUND UNIVERSITY   (Germany)

Author keywords

Energy distribution; Glow discharge mass spectrometry; Radiofrequency glow discharge

Indexed keywords

EID: 0347234337     PISSN: 01681176     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0168-1176(97)00119-5     Document Type: Article

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