Influence of discharge parameters on the resolution of depth profiling by pulsed glow discharge atomic emission spectrometry

Journal of analytical atomic spectrometry

Volumn 15, Issue 1, 2000, Pages 73-78

  Yang, Chenglong ^a   Ingeneri, Kris ^a   Mohill, Matt ^a   Harrison, W W ^a  

^a University of Florida ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; COPPER; ELECTRIC POTENTIAL; ELECTROPLATING; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HARD DISK STORAGE; METALLIC FILMS; PRESSURE EFFECTS; STEEL;

DEPTH PROFILING;

SPECTROMETRY;

EID: 0033902861     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/a906552k     Document Type: Article

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