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Volumn 22, Issue 41, 2012, Pages 21871-21877

Macroscopic high density nanodisc arrays of zinc oxide fabricated by block copolymer self-assembly assisted nanoimprint lithography

(4) Suresh, Vignesh a Huang, Meiyu Stella a Srinivasan, M P a Krishnamoorthy, Sivashankar b

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BLOCK COPOLYMER SELF-ASSEMBLY; CHARGE STORAGE; CHARGE TRAP; FLAT-BAND VOLTAGE SHIFT; HIGH DENSITY; HIGH RESOLUTION; HIGH-THROUGHPUT; LOW OPERATING VOLTAGE; MEMORY PERFORMANCE; NANODISCS; NARROW DISTRIBUTION; NON-VOLATILE; OXIDE THICKNESS; SPATIAL RESOLUTION; SUB-100 NM; ZNO;

BLOCK COPOLYMERS; FLASH MEMORY; MOS CAPACITORS; SELF ASSEMBLY; ZINC OXIDE;

NANOIMPRINT LITHOGRAPHY;

EID: 84867319441 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c2jm33444e Document Type: Article

Times cited : (20)

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