Design and implementation of an integral wall-mounted quartz crystal microbalance for atomic layer deposition

Review of Scientific Instruments

Volumn 83, Issue 9, 2012, Pages

  Riha, Shannon C ^a   Libera, Joseph A ^a   Elam, Jeffrey W ^a   Martinson, Alex B F ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION METHODS; COMMERCIAL TOOLS; EX SITU; FLOW DISTURBANCES; IN-SITU; IN-SITU TECHNIQUES; NEW DESIGN; QUASI-STATIC; TEMPERATURE DEPENDENT; THERMAL EQUILIBRATIONS;

CHEMICAL VAPOR DEPOSITION; DESIGN; FILM GROWTH; QUARTZ CRYSTAL MICROBALANCES;

ATOMIC LAYER DEPOSITION;

EID: 84866990055     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4753935     Document Type: Review

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