Compensation of temperature effects in quartz crystal microbalance measurements

Applied Physics Letters

Volumn 80, Issue 3, 2002, Pages 521-523

  Rahtu, Antti ^a   Ritala, Mikko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER; BASELINE DRIFT; CRYSTAL METHODS; HIGH TEMPERATURE; IN-SITU MONITORING; QUARTZ CRYSTAL; TEMPERATURE CHANGES; TIO;

ATOMIC LAYER DEPOSITION; FILM GROWTH; QUARTZ; TEMPERATURE; TITANIUM DIOXIDE;

QUARTZ CRYSTAL MICROBALANCES;

EID: 79956037412     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1433904     Document Type: Article

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