Development of a polygonal barrel-plasma enhanced chemical vapor deposition method for preparing powdered materials with a diamond-like carbon film

Chemical Engineering Journal

Volumn 209, Issue , 2012, Pages 616-622

  Honda, Yuji ^a   Akamaru, Satoshi ^a   Inoue, Mitsuhiro ^a   Abe, Takayuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Diamond like carbon; Dry process; Film deposition; Polygonal barrel plasma enhanced chemical vapor deposition (PB PECVD) system; Polymer particles

Indexed keywords

DIAMOND-LIKE CARBON; DRY PROCESS; FILM DEPOSITION; POLYGONAL BARREL-PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PB-PECVD) SYSTEM; POLYMER PARTICLES;

CARBON FILMS; DIAMONDS; FILM PREPARATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMETHYL METHACRYLATES; VAPORS;

DIAMOND LIKE CARBON FILMS;

EID: 84866174714     PISSN: 13858947     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cej.2012.08.051     Document Type: Article

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