Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties

Vacuum

Volumn 83, Issue 3, 2008, Pages 510-514

  Kamiya, Masao ^a,b   Tanoue, Hideto ^a   Takikawa, Hirofumi ^a   Taki, Makoto ^c   Hasegawa, Yushi ^c   Kumagai, Masao ^d  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b Itoh Optical Industrial Co Ltd   (Japan)

^c Onward Ceramic Coating Co Ltd   (Japan)

^d KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Heat resistance; T shape filtered arc deposition (T FAD); Tetrahedral amorphous carbon (ta C); Various diamond like carbon (DLC)

Indexed keywords

CARBON FILMS; CAVITY RESONATORS; COBALT; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; HYDROGEN; NONMETALS; TANTALUM;

DC BIASING; DLC FILMS; FILM PROPERTIES; FILTERED ARC DEPOSITION; HARD ALLOYS; HEAT RESISTANCE; HEAT-TREATMENT; HYDROGEN CONTENTS; T-SHAPE FILTERED ARC DEPOSITION; T-SHAPE FILTERED ARC DEPOSITION (T-FAD); T-SHAPED; TETRAHEDRAL AMORPHOUS CARBON (TA-C); VARIOUS DIAMOND-LIKE CARBON (DLC);

FILM PREPARATION;

EID: 52949126717     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.016     Document Type: Article

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