Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

Vacuum

Volumn 83, Issue 3, 2008, Pages 575-578

  Taguchi, Akira ^a   Inoue, Mitsuhiro ^a   Hiromi, Chikako ^a   Tanizawa, Masaaki ^a   Kitami, Tomohito ^b   Abe, Takayuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

^b Nippon Pillar Packing Co Ltd   (Japan)

Author keywords

Barrel sputtering system; Environment friendly process; Surface coating

Indexed keywords

LIQUID PHASE EPITAXY; SILICON COMPOUNDS; THICK FILMS;

BARREL SPUTTERING SYSTEM; ENVIRONMENT FRIENDLY PROCESS; NANO PARTICLES; PLATINUM THIN FILMS; SURFACE COATING;

PLATINUM;

EID: 52949154647     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.023     Document Type: Article

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