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Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 445-447

Comparison of diamond-like carbon films deposited from 40 kHz and 13.56 MHz r.f. plasmas

(5) Donnelly, K a Dowling, D P a O'Brien, T P a O'Leary, A a Kelly, T C a

a Ceramics Research Centre (Ireland)

Author keywords

Diamond like carbon; Frequency dependence; Pressure dependence; R.f. Plasma

Indexed keywords

EID: 0006648386 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(95)00462-9 Document Type: Article

Times cited : (15)

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