Surface coating of microparticles with tungsten carbide by using the barrel sputtering system

Vacuum

Volumn 83, Issue 3, 2008, Pages 633-636

  Akamaru, Satoshi ^a   Yamamoto, Hironari ^a   Abe, Takayuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Barrel sputtering system; Coating; Powder; Tungsten carbide

Indexed keywords

CLADDING (COATING); COATINGS; METHANE; OPTICAL DESIGN; PLASTIC COATINGS; POLYMER FILMS; SCANNING ELECTRON MICROSCOPY; TUNGSTEN; X RAY ANALYSIS;

BARREL SPUTTERING SYSTEM; COATING; GLASS PLATES; MICRO-PARTICLES; POLYMER MICROPARTICLES; POWDER; POWDER SAMPLES; RF POWERING; SCANNING ELECTRON MICROSCOPES; SPUTTERING CONDITIONS; SURFACE COATINGS; TOTAL PRESSURE; X-RAY SPECTRUM; XRD ANALYSIS;

TUNGSTEN CARBIDE;

EID: 52949134815     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.052     Document Type: Article

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