SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 20, Issue 5-6, 2011, Pages 845-848

Structural and mechanical properties of DLC films prepared by bipolar PBII&D

(5) Choi, Junho a Ishii, Keisuke a Kato, Takahisa a Kawaguchi, Masahiro b Lee, Wonsik c

a UNIVERSITY OF TOKYO (Japan)

b TOKYO METROPOLITAN INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Japan)

c Korea Institute of Industrial Technology (South Korea)

Author keywords

Bipolar PBII D; DLC films; Mechanical; Raman spectroscopy; Structural properties

Indexed keywords

DLC FILM; INTERNAL STRESS; MAXIMUM VALUES; MECHANICAL; NEGATIVE PULSE VOLTAGE; PLASMA BASED ION IMPLANTATION AND DEPOSITION; PULSE VOLTAGE; SI SUBSTRATES; STRUCTURAL AND MECHANICAL PROPERTIES; STRUCTURAL CHANGE; WAVE NUMBERS;

CARBON FILMS; DIAMOND LIKE CARBON FILMS; FILM PREPARATION; FULL WIDTH AT HALF MAXIMUM; GRAPHITE; ION IMPLANTATION; PLASMA DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; STRESSES; STRUCTURAL PROPERTIES;

MECHANICAL PROPERTIES;

EID: 79956091057 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2011.04.003 Document Type: Article

Times cited : (57)

References (12)

1
- 0027662845
- A. Grill Wear 168 1993 143 153
- (1993) Wear , vol.168 , pp. 143-153
- Grill, A.¹

2
- 34047270097
- J. Choi, S. Nakao, J. Kim, M. Ikeyama, and T. Kato Diamond Relat. Mater. 16 2007 1361 1364
- (2007) Diamond Relat. Mater. , vol.16 , pp. 1361-1364
- Choi, J.¹ Nakao, S.² Kim, J.³ Ikeyama, M.⁴ Kato, T.⁵

3
- 33947675431
- M. Ikeyama, S. Miyagawa, S. Nakao, J. Choi, and T. Miyajima Nucl. Instrum. Methods Phys. Res., Sect. B 257 2007 741 745
- (2007) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.257 , pp. 741-745
- Ikeyama, M.¹ Miyagawa, S.² Nakao, S.³ Choi, J.⁴ Miyajima, T.⁵

4
- 18444396934
- C. Casiraghi, F. Piazza, A.C. Ferrari, D. Grambole, and J. Robertson Diamond Relat. Mater. 14 2005 1098 1102
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1098-1102
- Casiraghi, C.¹ Piazza, F.² Ferrari, A.C.³ Grambole, D.⁴ Robertson, J.⁵

5
- 33749233512
- C. Casiraghi, A.C. Ferrari, and J. Robertson Phys. Rev. B 72 2005 (085401-1-085401-13)
- (2005) Phys. Rev. B , vol.72
- Casiraghi, C.¹ Ferrari, A.C.² Robertson, J.³

6
- 79956112108
- K. Miura, and M. Nakamura Hyomen Gijutsu 59 2008 203 205
- (2008) Hyomen Gijutsu , vol.59 , pp. 203-205
- Miura, K.¹ Nakamura, M.²

7
- 0001181304
- J. Schwan, S. Ulrich, V. Batori, and H. Ehrhardt J. Appl. Phys. 680 1996 440 447
- (1996) J. Appl. Phys. , vol.680 , pp. 440-447
- Schwan, J.¹ Ulrich, S.² Batori, V.³ Ehrhardt, H.⁴

8
- 0028513408
- M.A. Tamor, and W.C. Vassell J. Appl. Physiol. 76 1994 3823 3830
- (1994) J. Appl. Physiol. , vol.76 , pp. 3823-3830
- Tamor, M.A.¹ Vassell, W.C.²

9
- 0042633781
- J.R. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, and N.C. Tran J. Appl. Phys. 62 1987 4591 4596
- (1987) J. Appl. Phys. , vol.62 , pp. 4591-4596
- Conrad, J.R.¹ Radtke, J.L.² Dodd, R.A.³ Worzala, F.J.⁴ Tran, N.C.⁵

10
- 0036641689
- S. Miyagawa, S. Nakao, M. Ikeyama, and Y. Miyagawa Surf. Coat. Technol. 156 2002 322 327
- (2002) Surf. Coat. Technol. , vol.156 , pp. 322-327
- Miyagawa, S.¹ Nakao, S.² Ikeyama, M.³ Miyagawa, Y.⁴

11
- 28644448118
- J. Choi, S. Miyagawa, S. Nakao, M. Ikeyama, and Y. Miyagawa Nucl. Instrum. Methods Phys. Res., Sect. B 242 2006 357 359
- (2006) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.242 , pp. 357-359
- Choi, J.¹ Miyagawa, S.² Nakao, S.³ Ikeyama, M.⁴ Miyagawa, Y.⁵

12
- 0037165927
- J. Robertson Mater. Sci. Eng. R 37 2002 129 281
- (2002) Mater. Sci. Eng. R , vol.37 , pp. 129-281
- Robertson, J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.