SCOPUS 정보 검색 플랫폼

Volumn 80, Issue 4, 2005, Pages 324-331

Investigation on preparation and properties of thick DLC film in medium-frequency dual-magnetron sputtering

Author keywords

Graded and multilayered structure; Medium frequency dual magnetron sputtering; Properties; Thick Cr doped graded DLC film

Indexed keywords

ADHESION; CHROMIUM; DOPING (ADDITIVES); FRICTION; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; MULTILAYERS; VICKERS HARDNESS TESTING;

GRADED AND MULTILAYERED STRUCTURE; MEDIUM-FREQUENCY DUAL-MAGNETRON SPUTTERING; PROPERTIES; THICK CR-DOPED GRADED DLC FILMS;

THICK FILMS;

EID: 26444518768 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2005.06.002 Document Type: Article

Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.