Fixed charge in high-k/GaN metal-oxide-semiconductor capacitor structures

Applied Physics Letters

Volumn 101, Issue 10, 2012, Pages

  Son, Junwoo ^a   Chobpattana, Varistha ^a   McSkimming, Brian M ^a   Stemmer, Susanne ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; FIXED CHARGES; FLAT-BAND VOLTAGE; FLAT-BAND VOLTAGE SHIFT; HIGH-FREQUENCY CAPACITANCE-VOLTAGE MEASUREMENTS; INTERFACE DIPOLE; METAL-OXIDE-SEMICONDUCTOR CAPACITORS; SHEET CHARGES;

ALUMINUM; CAPACITORS; DIELECTRIC DEVICES; GALLIUM NITRIDE;

HAFNIUM OXIDES;

EID: 84866045390     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4751466     Document Type: Article

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