Micro-actuator with extended analog deflection at low drive voltage

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6114, Issue , 2006, Pages

  Dürr, Peter ^a   Gehner, Andreas ^a   Schmidt, Jan ^a   Kunze, Detlef ^a   Wagner, Michael ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Actuator; Electrostatic; Extended deflection range; Linearization; Pull in

Indexed keywords

CAPACITORS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTROSTATICS; LINEARIZATION; MICROOPTICS; MIRRORS;

EXTENDED DEFLECTION RANGE; OPTICAL CROSS CONNECTS; PULL-IN;

ACTUATORS;

EID: 33646191466     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.645826     Document Type: Conference Paper

References (6)

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