Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

Optics Express

Volumn 20, Issue 4, 2012, Pages 4291-4296

  Liu, Changning ^a,b   Liao, Yang ^a   He, Fei ^a   Shen, Yinglong ^a,b   Chen, Danping ^a,b   Cheng, Ya ^a   Xu, Zhizhan ^a   Sugioka, Koji ^c   Midorikawa, Katsumi ^c  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GLASS; SUBSTRATES; THREE DIMENSIONAL;

BI-LAYER; FREQUENCY-DOUBLED ND:YAG LASER; GLASS SUBSTRATES; MICROFLUIDIC CHANNEL; MICROFLUIDIC STRUCTURES; NANOSECOND LASER ABLATION; NANOSECOND LASERS; POROUS GLASS; POST ANNEALING; Q-SWITCHED; RHODAMINE 6G; THREE-DIMENSIONAL MICROFLUIDICS;

FLUIDIC DEVICES;

EID: 84863134068     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.004291     Document Type: Article

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